Patents by Inventor Ryulchirou Tamochi

Ryulchirou Tamochi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Scanning electron microscope
    Patent number: 7521695
    Abstract: In order to provide a full-automatic scanning electron microscope which carries out investigation jobs full-automatically from fine adjustment to reviewing, the scanning electron microscope of the present invention has a function of calculating the accuracy of correction after correction of coordinates and displaying it with vectors 39, a function of automatically determining a searching magnification for automatic object detection from the obtained information after correction of coordinates, and a function of calculating the frequency of occurrence of objects or defects and a time required for measurement from the searching magnification and conditions of measurement.
    Type: Grant
    Filed: April 11, 2007
    Date of Patent: April 21, 2009
    Assignees: Hitachi, Ltd., Hitachi Science Systems, Ltd.
    Inventors: Yoshinori Nakada, Shunsuke Koshihara, Ryulchirou Tamochi, Yayol Hosoya, Hidetoshi Morokuma
  • Scanning electron microscope
    Publication number: 20070194234
    Abstract: In order to provide a full-automatic scanning electron microscope which carries out investigation jobs full-automatically from fine adjustment to reviewing, the scanning electron microscope of the present invention has a function of calculating the accuracy of correction after correction of coordinates and displaying it with vectors 39, a function of automatically determining a searching magnification for automatic object detection from the obtained information after correction of coordinates, and a function of calculating the frequency of occurrence of objects or defects and a time required for measurement from the searching magnification and conditions of measurement.
    Type: Application
    Filed: April 11, 2007
    Publication date: August 23, 2007
    Inventors: Yoshinori Nakada, Shunsuke Koshihara, Ryulchirou Tamochi, Yayol Hosoya, Hidetoshi Morokuma