Abstract: According to one embodiment, a sensor device includes a movable body capable of vibrating, and a catch-and-release mechanism capable of catching the vibrating movable body and capable of releasing the caught movable body. The catch-and-release mechanism includes a stopper portion capable of stopping vibration of the movable body when the movable body contacts the stopper portion, and an elastic member configured to reduce a force acting between the movable body and the stopper portion.

Abstract: According to one embodiment, a vibration device includes a first movable unit including first and second movable portions arranged in a direction parallel to a first axis and enabled to vibrate in the direction parallel to the first axis, a second movable unit enabled to vibrate in a direction parallel to a second axis perpendicular to the first axis, and a connection unit configured to connect the first and second movable units together, wherein the following relationship is satisfied fi>(1+1/(2Qa))fa where a resonant frequency of the first movable unit in an in-phase mode is denoted by fi, a resonant frequency of the first movable unit in an anti-phase mode is denoted by fa, and a Q factor of resonance of the first movable unit in the anti-phase mode is denoted by Qa.

Abstract: According to one embodiment, a sensor includes a substrate, a variable capacitor including a bottom electrode provided on the substrate and a top electrode provided above the bottom electrode so as to face the bottom electrode, a movable structure including a portion located above the top electrode and being movable in accordance with a specific physical quantity, a support structure including at least one support portion supporting the top electrode, and a connection structure connecting the movable structure and the top electrode to displace the top electrode based on displacement of the movable structure, wherein the top electrode is displaced about an axis penetrating the at least one support portion, which serves as a first rotation axis.

Abstract: According to one embodiment, a sensor includes a substrate, a first MEMO element provided on the substrate, a cap layer providing a cavity for accommodating the first MEMS element, and a second MEMS element for monitoring a pressure in the cavity, the second MEMS element being provided on the substrate in the cavity.

Abstract: According to one embodiment, a variable capacitance bank device, including a plurality of capacitor banks for generation of a variable capacitance, the plurality of capacitor banks being connected parallel with each other. each of the capacitor banks being constituted by serially connecting a fixed capacitor for generation of a fixed capacitance and a MEMS capacitor for generation of the variable capacitance. capacitances of the fixed capacitors in different capacitor banks being set at different values. capacitances of the MEMS capacitors in different capacitor banks being set at an equal value.

Abstract: According to one embodiment, a pressure sensor includes a fixed electrode fixed on a substrate, a movable electrode provided above the fixed electrode, so as to be movable in vertical directions, a thin-film structure of a dome shape, forming, together with the substrate, a cavity to accommodate the fixed electrode and the movable electrode, the thin-film structure includes a communicating hole to communicate the cavity with an outside of the thin-film structure. A voltage is applied between the fixed electrode and the movable electrode to measure mechanical displacement of the movable electrode.