Abstract: A sprayed film including a film surface in which a value of an area ratio S/A obtained by dividing a surface area S (?m2) of a portion of the measurement surface (S-L surface) of the film surface within one evaluation region by an area A (?m2) of a portion of a reference surface forming a plane located at an arithmetic average height of the measurement surface (S-L surface), which is within the evaluation region is 1.75 or more and 3 or less, and a surface roughness Sa of a portion of the measurement surface (S-L surface) within the evaluation region is 0.4 ?m or more and 8 ?m or less. Generation of particles which is caused by cracks of the sprayed film can be reduced when dry etching using gas plasma is performed with a semiconductor manufacturing apparatus or the like using the sprayed film as a corrosion-resistant film.

Abstract: A developing fluid supply apparatus comprises a supply path connected to a developing part configured to develop a substrate on which a metal-containing resist film has been formed and which has been subjected to exposure processing, with a developing fluid containing at least one of gas and mist of a weak acid, a developing fluid generator configured to generate the developing fluid from a developing liquid; and a heating part configured to heat the developing fluid to be supplied to the developing part via the supply path.

Abstract: Provided is a rare earth oxide thermal spraying material which has a granular form having a volume-based average particle diameter D50 of 10 ?m to 18 ?m inclusive as measured by a laser diffraction scattering method, a compression degree of 13 or less and a BET specific surface area of 0.1 m2/g to 2 m2/g inclusive. The rare earth oxide thermal spraying material according to the present invention can form a dense thermally sprayed film having a small porosity even by atmospheric plasma spraying in which a thermal spraying material is supplied in a solid (particle) form. When a thermally sprayed film is formed by atmospheric plasma spraying using the rare earth oxide thermal spraying material according to the present invention, it becomes possible to form the thermally sprayed film in a curved shape easily and to form the thermally sprayed film in a large thickness.