Abstract: A combination of a ceramic layer essentially consisting of magnesia ceramic material and a metallic layer is proposed for a layered assembly for use in applications such as electrostatic chucks which are subjected to thermal stress. A combination of magnesia ceramic material and ferritic stainless steel is preferred because of the similarities of the thermal expansion coefficients of these materials. When a larger difference in the thermal expansion coefficients exists between the selected combination of materials, a damper layer having an intermediate thermal expansion coefficient may be used so as to accommodate the difference in the thermal expansion of the two layers.

Abstract: A method of manufacturing ceramic products. This method comprises the steps of mixing ceramic powder, organic materials imparting formability to the ceramic powder, and a first solvent, thereby preparing a mixture, shaping the mixture thereby forming a product of a simple shape, drying the product, immersing the dried product in a bath of a second solvent, thereby plasticizing the product, and re-shaping the plasticized product.