Abstract: A contact type prove achieves a high-precision measurement of a shape of even a steeply-inclined surface in the vicinity of vertical by controlling a contact force stably. In a shape measuring method for measuring the shape of the surface of a measured object by moving a contact type probe along the surface of the measured object, a slope of the measured object surface is estimated depending on the magnitude of a component force of the contact force applied to the probe and when it is determined that the slope is in the vicinity of vertical, a probe supporting unit is moved in a direction perpendicular to the moving direction of the probe supporting unit.

Abstract: A measuring apparatus for measuring a three-dimensional shape includes a light source, a contact tip that is brought into contact with an object to be measured and scans the object to be measured, a holding portion that is movable along the object to be measured, a coupling portion for coupling the contact tip to the holding portion via a flexible support member, and an objective lens supported by the holding portion. In addition, an optical system condenses light provided by the light source on the contact tip via the objective lens, a photodetector receives backscattered light from the contact tip and detects a position of the contact tip that is brought into contact with the object to be measured, a moving unit moves the holding portion, and a position measuring instrument measures a position of the holding portion.

Abstract: A contact type prove achieves a high-precision measurement of a shape of even a steeply-inclined surface in the vicinity of vertical by controlling a contact force stably. In a shape measuring method for measuring the shape of the surface of a measured object by moving a contact type probe along the surface of the measured object, a slope of the measured object surface is estimated depending on the magnitude of a component force of the contact force applied to the probe and when it is determined that the slope is in the vicinity of vertical, a probe supporting unit is moved in a direction perpendicular to the moving direction of the probe supporting unit.

Abstract: Provided is a method for measuring the shape of the surface of an object by moving a contact probe along the surface of the object. The relationship between the surface of the object and the direction of a moving unit is supposed from the magnitudes of the components of a contact force applied to the probe. Thus, the contact force of the probe is controlled using only a moving unit that is determined to be nearly orthogonal to the surface of the object under measurement.

Abstract: Provided is a measuring apparatus for performing a highly accurate measurement of a three-dimensional shape having a rectangular groove shape portion, such as a micromachine, by using a contact tip formed of a fine particle, in which the contact tip is coupled to a holding portion via a flexible support member and a transparent fixed member, and a laser beam is condensed by an objective lens to be focused on a bottom surface of the contact tip so that the contact tip is brought into contact with a surface of an object to be measured by an optical radiation pressure, to thereby allow a highly accurate geometry measurement to be performed by adjusting a direction of vibration of the contact tip even when the object to be measured has a three-dimensional structure having a rectangular groove shape portion.