Patents by Inventor Ryusuke OISHI

Ryusuke OISHI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240053671
    Abstract: A method for producing a reflective mask blank, includes: forming a reflective multilayer film on or above a substrate by using an ion beam sputtering apparatus and a process gas, the ion beam sputtering apparatus accelerating an ion generated by applying a voltage to a grid, and causing the ion to collide with a target to perform sputtering, the process gas including at least one inert gas selected from He, Ne, Ar, Kr, Xe, Rn, and N2 as an ion source, in which a product of an effective area (cm2) of the grid and a flow rate (sccm) of the process gas supplied to the ion beam sputtering apparatus during film formation is 3600 (cm2·sccm) or less.
    Type: Application
    Filed: October 27, 2023
    Publication date: February 15, 2024
    Applicant: AGC Inc.
    Inventors: Ryusuke OISHI, Takahiro KIKUCHI
  • Publication number: 20240045320
    Abstract: A reflective mask blank includes a substrate; a multilayer reflective film that reflects EUV light; a protection film that protects the multilayer reflective film; and an absorption film that absorbs the EUV light, in this order. The protection film contains 50 at % or more of Rh. When a band-shaped gray scale image parallel to an interface between the protection film and the multilayer reflective film is obtained by imaging a cross section of the protection film with a transmission electron microscope (TEM) and a luminance profile of the gray scale image in a longitudinal direction of the gray scale image is created, a number of peaks of the luminance profile per 100 nm in the longitudinal direction of the gray scale image is 50 or more.
    Type: Application
    Filed: October 20, 2023
    Publication date: February 8, 2024
    Applicant: AGC Inc.
    Inventors: Takuma KATO, Daijiro AKAGI, Takeshi OKATO, Ryusuke OISHI, Yusuke ONO