Patents by Inventor Ryuta Ihara

Ryuta Ihara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE COOLING DEVICE AND SUBSTRATE TREATMENT SYSTEM
    Publication number: 20110290185
    Abstract: A substrate cooling device configured to cool a substrate after a treatment, the device includes: a housing having a space configured to house a substrate internally; a pair of holder sections provided so as to face an inner wall of the housing, and including a groove section supporting an end neighborhood of the substrate; and a pair of cooling sections including a cooling mechanism provided to sandwich the pair of holder sections in a direction crossing a direction in which the holder sections face each other. According to the invention, a time for cooling the substrate after the treatment can be reduced.
    Type: Application
    Filed: December 2, 2009
    Publication date: December 1, 2011
    Applicant: SHIBAURA MECHATRONICS CORPORATION
    Inventors: Ryuta Ihara, Hideyuki Nitta, Yoshinori Kawagoe