Patents by Inventor Ryuta MOCHIZUKI

Ryuta MOCHIZUKI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • VAPORIZATION DEVICE, SEMICONDUCTOR MANUFACTURING SYSTEM, AND METHOD FOR VAPORIZING SOLID RAW MATERIAL
    Publication number: 20240124971
    Abstract: A vaporization device includes a vaporization amount adjusting plate that covers a surface of a solid raw material, and an exhaust passage that exhausts a carrier gas that flows while being faced with the vaporization amount adjusting plate. The vaporization amount adjusting plate has a plurality of through holes. An aperture ratio per unit area in the adjusting plate varies along a flowing direction of the carrier gas. The carrier gas is vaporized from the solid raw material and carries a predetermined raw material that has passed through the plurality of through holes.
    Type: Application
    Filed: October 11, 2023
    Publication date: April 18, 2024
    Inventors: Yuichi FURUYA, Ryuta MOCHIZUKI