Abstract: A method of manufacturing a vibrator element having a vibrating part which vibrates in a thickness-shear mode, and a thin-wall part which is coupled to the vibrating part, and which is thinner than the vibrating part includes a preparation step of preparing a quartz crystal substrate, a resist film formation step of forming a resist film in a vibrating part area of the quartz crystal substrate where the vibrating part is formed, an etching step of etching the quartz crystal substrate via the resist film, then ending the etching in a state in which the resist film remains in the vibrating part area to thereby form the vibrating part and the thin-wall part, and a resist film removal step of removing the resist film remaining.

Abstract: A method for manufacturing a vibration element that includes a base portion, a first vibration arm and a second vibration arm that extend from the base portion along a first direction and are arranged along a second direction intersecting the first direction, and bottomed grooves on both main surfaces of the first vibration arm and both main surfaces of the second vibration arm includes: a preparing step of preparing a crystal substrate; a protective film forming step of forming a protective film on the crystal substrate except for groove regions that are regions in which the grooves are formed; and a dry etching step of dry etching the crystal substrate through the protective film to form the grooves. The grooves provided in at least one of the first vibration arm and the second vibration arm include a first groove and a second groove arranged along the second direction.

Abstract: A method for manufacturing a vibrator device includes a first dry etching step of dry-etching a quartz crystal substrate having a first surface and a second surface from the side facing the first surface to form first grooves and part of the outer shapes of a first vibrating arm and a second vibrating arm, a second dry etching step of dry-etching the quartz crystal substrate from the side facing the second surface to form second grooves and part of the outer shapes of the first vibrating arm and the second vibrating arm, and thereafter, a wet etching step of wet-etching the side surfaces of the first vibrating arm and the second vibrating arm.

Abstract: It is possible to improve a measurement accuracy of a liquid flow volume, thereby improving reproducibility of a measured value. Provided is a flow volume measuring device including a light source which emits light to a measuring-target region; a light receiving element which receives light scattered at the measuring-target region from the light emitted from the light source; a contact member having translucency with respect to a wavelength of the emitted light and a wavelength of the scattered light, the contact member including a surface which faces the measuring-target region and with which the measuring-target region is contactable over the entire surface; and a flow volume measuring unit which measures a flow volume of liquid flowing through the measuring-target region based upon the scattered light.

Abstract: It is possible to improve a measurement accuracy of a liquid flow volume, thereby improving reproducibility of a measured value. Provided is a flow volume measuring device including a light source which emits light to a measuring-target region; a light receiving element which receives light scattered at the measuring-target region from the light emitted from the light source; a contact member having translucency with respect to a wavelength of the emitted light and a wavelength of the scattered light, the contact member including a surface which faces the measuring-target region and with which the measuring-target region is contactable over the entire surface; and a flow volume measuring unit which measures a flow volume of liquid flowing through the measuring-target region based upon the scattered light.