Abstract: A fluid controller comprises a pivotal member pivotally movable about the axis of a horizontal pin, a pair of rollable rollers rotatably supported by the lower end of the pivotal member and having an axis in parallel to the axis of the horizontal pin, a slope provided by the upper surface of a bonnet for allowing each roller to roll therealong in a plane orthogonal to the axis of the roller, and a stopper supported by the pivotal member so as to be movable between a position to engage with a valve stem and a position to be out of engagement therewith. The pivotal member is pivotally moved to roll the rollers along the slope and move the roller-supporting pivotal member upward or downward with the rolling movement, whereby the horizontal pin is raised or lowered.

Abstract: A ring divided in two is fitted around a valve stem at a portion thereof projecting upward beyond a piston, with a C-ring fitted around the divided ring. The divided ring has an annular projection formed on its inner periphery and fitted in an annular groove which is formed in the valve stem at the portion thereof projecting upward beyond the position. The divided ring is formed in its outer periphery with an annular recess having fitted therein the inner peripheral portion of the C-ring.

Abstract: This invention relates to a granular phenolic resin forming material. Grains are obtained by pulverizing a hardened phenol resin or epoxy resin, particularly a waste, having aromatic rings. The grains are heated to react with a phenolic substance, to solubilize at least surfaces thereof, whereby the grains are made formable again. The pulverized, hardened grains and the phenolic substance, preferably a phenol, are mixed in the ratio of 100/10 to 100/90. An acid catalyst may be used, as necessary, in a quantity not exceeding 9 parts. A preferred reaction temperature is 80.degree. to 180.degree. C. at atmosphere pressure. The forming material of this invention may be formed with hexamine compounded therewith.

Abstract: An inner peripheral portion of a metallic diaphragm (11) having a mounting hole (11a) at a central portion is held between a metallic welding fitting (8, 8') and a metallic holding member (6, 17), each respectively having an annular flat portion (8a, 6a, 17a) to contact an inner peripheral portion. The inner peripheral portion of the metallic diaphragm and the portions of the metallic welding fitting and the metallic holding member contacting the inner peripheral portion of the foregoing metallic diaphragm are welded at W', W" along entire peripheries thereof in order to secure these three components together as one body.

Abstract: A valve body is provided with a gas feed passage having an inlet and an outlet, a tank chamber, and a branch passage having a first portion connected between the gas feed passage and the tank chamber and an outlet extending from the tank chamber to a side of the valve body. A first valve is mounted on the valve body and selectively opens and closes the gas feed passage at a point downstream of the junction of the branch passage with the gas feed passage. A second valve is mounted on the valve body and selectively opens and closes the branch passage at a point between the tank chamber and the junction of the branch passage and the gas feed passage. A vacuum pump is provided to evacuate the tank chamber. When the first valve is open and the second valve is closed, gas may flow from an inlet pipe, through the gas feed passage and the first valve to a semiconductor process chamber.

Abstract: A fluid flow controller comprising a flow passage which is opened and closed by the flexing of a diaphragm secured at its periphery characterized in that the diaphragm is a laminate of a plurality of metal diaphragms and in that friction reducing material is provided between the diaphragms.