Patents by Inventor Sébastien Cattet

Sébastien Cattet has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Controlled temperature implantation
    Patent number: 8247309
    Abstract: In order to reduce and render uniform the surface roughness and variations in thickness of a layer after detachment (post-fracture) of a donor substrate, the mean temperature of the donor substrate during implantation thereof is controlled so as to be in the range 20° C. to 150° C. with a maximum temperature variation of less than 30° C.
    Type: Grant
    Filed: March 26, 2009
    Date of Patent: August 21, 2012
    Assignee: Soitec
    Inventors: Sébastien Cattet, Guillaume Cattet-Guerrini, legal representative, Lise Guerrini, legal representative, Nadia Ben Mohamed, Benjamin Scarfogliere
  • CONTROLLED TEMPERATURE IMPLANTATION
    Publication number: 20110312156
    Abstract: In order to reduce and render uniform the surface roughness and variations in thickness of a layer after detachment (post-fracture) of a donor substrate, the mean temperature of the donor substrate during implantation thereof is controlled so as to be in the range 20° C. to 150° C. with a maximum temperature variation of less than 30° C.
    Type: Application
    Filed: March 26, 2009
    Publication date: December 22, 2011
    Applicant: S.O.I. Tec Silicon on Insulator Technologies
    Inventors: Sébastien Cattet, Lise Guerrini, Nadia Ben Mohamed, Benjamin Scarfogliere