Patents by Inventor Sëbastien Collura

Sëbastien Collura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD FOR DECONTAMINATING SEMICONDUCTOR WAFERS
    Publication number: 20110253174
    Abstract: A method for decontaminating at least one object contained in a chamber, the method including a succession of alternated steps of lowering and increasing the pressure in the chamber.
    Type: Application
    Filed: March 30, 2011
    Publication date: October 20, 2011
    Applicant: STMicroelectronics (Rousset) SAS
    Inventors: Christophe Martin, Sëbastien Collura