Abstract: A measuring system including: at least two electromechanical resonators each having a resonant frequency varying around an offload resonant frequency according to a physical quantity to be measured; at least one reading device connected to inputs of the resonators and configured to supply an excitation signal on the inputs; and a memory in which is recorded, for each resonator, offload resonance information relating to the offload resonant frequency of the resonator. Each reading device is configured to determine the resonant frequency of one or more resonators selected for reading by configuring at least one element of the reading device using the offload resonance information stored for each selected resonator.

Abstract: A device with a suspended beam and piezoresistive means of detecting displacement of the beam and a method of manufacturing the device are disclosed. The device comprises a support, a suspended beam, moving parallel to the plane of the support, and means of detecting displacement, comprising at least two piezoresistive strain gauges that are not in line with each other. The beam is suspended through detection means. The two gauges are located on two opposite lateral faces of the beam respectively.

Abstract: A resonant device with piezoresistive detection includes a resonator connected elastically to the support of the device. The device includes: a support; a suspended resonator, which moves parallel to the plane of the support; means for actuating the resonator; and means for detecting the movement, including at least one piezoresistive gauge. The resonator is anchored to the support through at least one flexurally elastic element, to enable the threshold where a non-linear displacement regime appears to be raised. The device can be manufactured by a surface technology, and applies notably to resonant mass sensors.

Abstract: An in-plane actuated resonant device, and method of manufacturing the device. The device includes a support; a suspended beam, moving parallel to the plane of the surface of the support and anchored to the support through at least one of its ends; and a mechanism actuating the beam to enable its displacement parallel to the support. The actuation mechanism includes at least one suspended element, anchored to the support and to one lateral face of the beam. The element moves when a control voltage is applied to the element and thus causes displacement of the beam. The device may be manufactured using surface technology and is applicable particularly for resonant mass sensors.

Abstract: The invention relates to a nano electro- mechanical system (NEMS) formed on a substrate (21) and comprising at least one fixed part associated with the substrate and at least one movable part (23) in relation to the substrate, said system comprising transduction means (24) capable of exciting the movable part to confer on it a movement and/or to detect a movement of movable part, the transduction means comprising at least one electrically conductive material. The electrically conductive material is made of an AlSi alloy based deposition, said deposition being supported at least in part by the movable part of the system.

Abstract: An in-plane MEMS or NEMS detection device for measuring displacements directed along a direction including a seismic mass suspended with respect to a substrate, the seismic mass being pivotable about an axis perpendicular to the plane of the substrate, at least one piezoresistive strain gauge mechanically connected to the seismic mass and the substrate, wherein the piezoresistive gauge has a thickness lower than that of the seismic mass, and wherein the axis of the piezoresistive strain gauge is orthogonal to the plane containing the pivot axis and the center of gravity of the seismic mass and the plane is orthogonal to the direction of the displacements to be measured.

Abstract: It consists of a microcomponent comprising a cavity (13) delimited by a cap (12) enclosing an active part (10) supported by a substrate (11). The cap (12) comprises a top wall (12a) comprising stiffening means with at least one projecting stiffening member (12b), said stiffening member (12b) being located between two recessed areas (12c) of the top wall (12a) and having one end (14) at a distance from the recessed areas (12c) without coming into contact with the substrate (11).

Abstract: An electromechanical resonator produced on a substrate, and a method of producing thereof, including: a suspended structure produced at least partly from the substrate, configured to have a vibration imparted to it such that it resonates at least one natural resonance frequency of the suspended structure; an anchor structure to anchor the suspended structure, by at least one area of its periphery, to the remainder of the substrate, and dimensioned to resonate at the resonance frequency; a mechanism to excite the suspended structure, to cause it to vibrate at the resonance frequency; and a mechanism to detect the vibration frequency of the suspended structure.

Abstract: The invention relates to a micromachined accelerometer using a movable seismic mass suspended in relation to the substrate by elastic connections only allowing translation in its own plane along a sensitive axis (Oy). The mass acts on at least one elongate resonator by means of a force amplification structure associated with this resonator. The amplification structure comprises a rigid lever arm, a first end of which is connected to the seismic mass by a connection having, in the plane of the mass, a high stiffness in the direction of the sensitive axis (Oy) and a low stiffness in the perpendicular direction, and a second end is connected to an anchor point on the substrate. The second end of the lever arm is a rigid head piece surrounding the anchor point and connected to this anchor point by a rotational connection about a center of rotation.

Abstract: The device resonant comprises a plurality of synchronized oscillators. Each oscillator comprises a resonator which comprises detection means providing detection signals representative of oscillation of the resonator to a feedback loop connected to an excitation input of the resonator. The detection signals control the conductivity of the feedback loop of the oscillator. The excitation inputs of all the resonators are connected to a common point which constitutes the output of the resonant device. A capacitive load is connected between said common point and a reference voltage.

Abstract: The invention relates to an electromechanical resonator including at least one deformable element, actuating means for this deformable element for applying to it, simultaneously, at least one first actuating force at a first frequency, and a second actuating force at least one second frequency, the first and second frequencies creating at least two simultaneous resonances at a frequency equal to the frequency of one of the actuating forces.

Abstract: The resonant device comprises an electromechanical resonator of nanometric or micrometric size that comprises a mobile element and a fixed element. Detection means provide detection signals representative of movement of the mobile element with respect to the fixed element to a feedback loop that is connected to an excitation input of the resonator. The resonator is formed on the same substrate as the detection means and feedback loop. The feedback loop comprises at most first and second transistors connected in series between a reference voltage and the excitation terminal. A capacitive load is connected between the excitation terminal and reference voltage. The detection signals control the conductivity of the first transistor.

Abstract: The resonant device comprises an electromechanical resonator of nanometric or micrometric size that comprises a mobile element and a fixed element. Detection means provide detection signals representative of movement of the mobile element with respect to the fixed element to a feedback loop that is connected to an excitation input of the resonator. The resonator is formed on the same substrate as the detection means and feedback loop. The feedback loop comprises at most first and second transistors connected in series between a reference voltage and the excitation terminal. A capacitive load is connected between the excitation terminal and reference voltage. The detection signals control the conductivity of the first transistor.

Abstract: The invention concerns a sensor device, of nanowire type, comprising at least one nanowire comprising a first conductive region (2) and a second region (4) in insulator material, this second region not occupying the entire thickness of the nanowire, and a current being able to circulate in the nanowire from one of its ends to the other.

Abstract: The device resonant comprises a plurality of synchronized oscillators. Each oscillator comprises a resonator which comprises detection means providing detection signals representative of oscillation of the resonator to a feedback loop connected to an excitation input of the resonator. The detection signals control the conductivity of the feedback loop of the oscillator. The excitation inputs of all the resonators are connected to a common point which constitutes the output of the resonant device. A capacitive load is connected between said common point and a reference voltage.

Abstract: The invention relates to a micromachined accelerometer using a movable seismic mass suspended in relation to the substrate by elastic connections only allowing translation in its own plane along a sensitive axis (Oy). The mass acts on at least one elongate resonator by means of a force amplification structure associated with this resonator. The amplification structure comprises a rigid lever arm, a first end of which is connected to the seismic mass by a connection having, in the plane of the mass, a high stiffness in the direction of the sensitive axis (Oy) and a low stiffness in the perpendicular direction, and a second end is connected to an anchor point on the substrate. The second end of the lever arm is a rigid head piece surrounding the anchor point and connected to this anchor point by a rotational connection about a center of rotation.

Abstract: The magnetic device according to the invention is integrated on a substrate and comprises at least one element made of piezoelectric material associated with actuating electrodes, and at least one magnetic element able to deform under the stress of the piezoelectric material element. The device has the form of a beam movable with respect to the substrate, and comprises two transverse parts of predetermined width, along a reference longitudinal axis. The piezoelectric material element is formed by at least a part of a transverse part and each transverse part comprises a zone for mechanical anchoring on the substrate. The transverse parts are connected by at least one central branch, of predetermined width, on which the magnetic element is arranged.

Abstract: The invention relates to accelerometer structures micro-machined according to micro-electronics technologies. The accelerometer according to the invention comprises a substrate, an elastically deformable thin-layer membrane suspended above the substrate and secured to the substrate at its periphery, a proof mass suspended above the membrane and linked to the latter by a central stud, and capacitive interdigitated combs distributed about the mass, having movable plates secured to the mass and fixed plates secured to the substrate. The fixed plates and movable plates of the various combs are of differentiated heights to help in the discrimination of the upward and downward vertical accelerations.

Abstract: It consists of a microcomponent comprising a cavity (13) delimited by a cap (12) enclosing an active part (10) supported by a substrate (11) The cap (13) comprises a top wall (12a) comprising stiffening means with at least one projecting stiffening member (12b) said stiffening member (12b) being located between two recessed areas (12c) of the top wall (12a) and having one end (14) at a distance from the recessed areas (12c) without coming into contact with the substrate (11).

Abstract: A device, with piezoresistive detection comprising at least: a proof body on which an effort to be measured is exerted, means of detecting a strain exerted by the proof body under the action of the effort, comprising at least one suspended piezoresistive strain gauge, a strain amplifier cell comprising at least two rigid arms mechanically linked to each other by at least one link element at the level of a first of their ends, a second end of a first of the two rigid arms being mechanically linked to the proof body, a second end of a second of the two rigid arms being fixed to the substrate, the link element being mechanically linked to a first end of the suspended piezoresistive strain gauge.