Patents by Inventor S.C. Hsu

S.C. Hsu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Novel organic remover for advanced reticle contamination cleaning
    Publication number: 20070066071
    Abstract: A method includes introducing an acid solution having ethanol and an acid to a substrate and cleaning the substrate using the acid solution; applying an ultrasonic wave to the acid solution substantially during the cleaning of the substrate; and performing a fine cleaning of the substrate after the cleaning of substrate with the acid solution.
    Type: Application
    Filed: October 28, 2005
    Publication date: March 22, 2007
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chia-Hsien Chen, Hsiang Hsu, S.C. Hsu, Chian-Hun Lai, Chun-Hung Kung, Jong-Yuh Chang