Patents by Inventor S. Mark Borowicz

S. Mark Borowicz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods and systems for creating a recipe for a defect review process
    Patent number: 7440086
    Abstract: Methods and systems for creating a recipe for a defect review process are provided. One method includes determining an identity of a specimen on which the defect review process will be performed. The method also includes identifying inspection results for the specimen based on the identity. In addition, the method includes creating the recipe for the defect review process based on the inspection results. One system includes a sensor configured to generate output responsive to an identity of a specimen on which the defect review process will be performed. The system also includes a processor configured to determine the identity of the specimen using the output, to identify inspection results for the specimen based on the identity, and to create the recipe for the defect review process based on the inspection results.
    Type: Grant
    Filed: September 20, 2006
    Date of Patent: October 21, 2008
    Assignee: KLA-Tencor Technologies Corp.
    Inventors: S. Mark Borowicz, Mehran Nasser-Ghodsi, Kenneth J. Krzeckzowski