Abstract: A multimodal biometric identification or authentication system includes a plurality of biometric clients. Each of the biometric clients may include devices for capturing biometric images of a plurality of types. The system includes a router in communication with the biometric clients. The router receives biometric images from, and returns biometric scores or results to, the biometric clients. The system includes a plurality of biometric matching engines in communication with the router. Each biometric matching engine includes multiple biometric processors. Each biometric processor is adapted to process biometric data of a particular type. The biometric matching engines transmit and receive biometric data to and from the router.

Abstract: A system for the processing of large substrates such as those employed in the manufacture of flat panel displays is disclosed. In a first embodiment, a loadlock assembly, comprising two loadlock chambers configured to accommodate a multiplicity of large substrates, is coupled to a processing chamber with an input/output port. The processing chamber and the loadlock assembly are configured to move relative to each other to allow positioning of: either of the two loadlock chambers with said port; and any one of the multiplicity of large substrates for passage through the port. In a second embodiment, input and output loadlock assemblies, each comprising two loadlock chambers, are coupled to a dual-ported processing chamber in a pass-through configuration, wherein the input and output loadlock assemblies each move independently relative to the processing chamber.

Abstract: A detector optics system for collecting secondary electrons (SEs) and/or backscattered electrons (BSEs) in a multiple charged particle beam test system is disclosed. Aspects of the detector optics system include: the ability to image and/or electrically test a number of locations simultaneously across the full width of a large substrate with high throughput and uniform collection efficiency while avoiding crosstalk between signals generated by neighboring beams. In one embodiment, a linear array of N electron beams causes SEs to be emitted from the substrate, which are then collected by one or more linear arrays of ?2N detectors. Each linear array is connected to a signal combiner circuit which dynamically determines which detectors are collecting SEs generated by each electron beam as it scans across the substrate surface and then combines the signals from these detectors to form N simultaneous output signals (one per charged particle beam) for each detector array.

Abstract: A multimodal biometric identification or authentication system includes a plurality of biometric clients. Each of the biometric clients may include devices for capturing biometric images of a plurality of types. The system includes a router in communication with the biometric clients. The router receives biometric images from, and returns biometric scores or results to, the biometric clients. The system includes a plurality of biometric matching engines in communication with the router. Each biometric matching engine includes multiple biometric processors. Each biometric processor is adapted to process biometric data of a particular type. The biometric matching engines transmit and receive biometric data to and from the router.

Abstract: A multi-column charged particle optics assembly comprises: a first optical component which is continuous through all columns of the charged particle optics assembly; and a multiplicity of independently alignable second optical components coupled to the first optical component, such that there is one second component for each column in the charged particles optics assembly. The first component provides mechanical integrity to the charged particle optics assembly and each second optical component is independently alignable to the optic axis of its corresponding column. In a further embodiment, the charged particle optics assembly comprises: first and second continuous optical components; and a multiplicity of independently alignable electrodes coupled to the second optical component, such that there is a corresponding independently alignable electrode for each column.