Patents by Inventor Sören LIEBSCH

Sören LIEBSCH has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230175906
    Abstract: A glass wafer is provided that includes a sheetlike glass substrate with an opening. The sheetlike glass substrate is configured for use in a sensor selected from a group consisting of a pressure sensor, a piezoresistive sensor, a capacitive pressure sensor, and a piezoresistive pressure sensor. The opening is defined in the glass substrate from a first surface to a second, opposite surface. The opening has a cross-sectional area that is delimited by a straight portion having a minimum length of at least 10 ?m and a side face with a surface characterized by a skewness (Ssk) of at most 5.0.
    Type: Application
    Filed: January 17, 2023
    Publication date: June 8, 2023
    Applicant: SCHOTT AG
    Inventors: Ulrich PEUCHERT, Martin BLEZINGER, Thomas UTZ, Christian BREITBACH, Matthias JOTZ, Sören LIEBSCH