Abstract: A piezoelectric-driven 2-D stage (X-Y axis) utilizing the frictional stick-slip effect and inertia force can be designed and fabricated to achieve ultra high resolution and long travel range. Based upon the principle of elastic deformation, a high resolution piezoelectric-driven micropositioner (Z-axis) is designed and fabricated. Moreover, a CD pick-up head and analog linear controller are integrated with Z-axis micropositioner to be a autofocus system. This design is based upon the requirement of the optical lithography developments by using 193 nm Excimer Laser. During this special lighography process, Z-axis micropositioner is needed for the laser beam focusing. A 2-D X-Y stepper is also needed for the movement of the wafer under laser exposure. The wafer stepper is based on the step-repeat and step-scan process.