Patents by Inventor Sabarinath JAYASEELAN

Sabarinath JAYASEELAN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Inline buried metal void detection by surface plasmon resonance (SPR)
    Patent number: 9588044
    Abstract: A method and apparatus are provided for using SPR to detect buried voids in a semiconductor wafer inline post metal deposition. Embodiments include forming a first, a second, and a third metal structure in a first, a second, and a third adjacent die of a wafer; performing a SPR on the first, second, and third metal structures inline; detecting a first, a second, and a third SPR wavelength corresponding to the first, second, and third metal structures, respectively; comparing a difference between the first SPR wavelength and the second SPR wavelength and a difference between the third SPR wavelength and the first SPR wavelength against a threshold value; and determining a presence or an absence of a buried void in the first metal structure based on the comparison.
    Type: Grant
    Filed: July 16, 2015
    Date of Patent: March 7, 2017
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Sabarinath Jayaseelan, Suraj Kumar Patil
  • INLINE BURIED METAL VOID DETECTION BY SURFACE PLASMON RESONANCE (SPR)
    Publication number: 20170016822
    Abstract: A method and apparatus are provided for using SPR to detect buried voids in a semiconductor wafer inline post metal deposition. Embodiments include forming a first, a second, and a third metal structure in a first, a second, and a third adjacent die of a wafer; performing a SPR on the first, second, and third metal structures inline; detecting a first, a second, and a third SPR wavelength corresponding to the first, second, and third metal structures, respectively; comparing a difference between the first SPR wavelength and the second SPR wavelength and a difference between the third SPR wavelength and the first SPR wavelength against a threshold value; and determining a presence or an absence of a buried void in the first metal structure based on the comparison.
    Type: Application
    Filed: July 16, 2015
    Publication date: January 19, 2017
    Inventors: Sabarinath JAYASEELAN, Suraj Kumar PATIL