Abstract: A method for producing an electromigration-resistant crystalline transition-metal silicide layer of a layer sequence, for example, to provide a micro heater includes, supplying a semiconductor substrate including an electrically insulating layer; physically depositing a transition metal on the electrically insulating layer; carrying out a plasma-enhanced chemical vapor deposition while forming an inert gas plasma; conveying monosilane to the inert gas plasma, with the monosilane decomposing into silicon and hydrogen and the silicon in the gaseous phase entering into a chemical reaction with the transition metal in order to form the electromigration-resistant crystalline transition-metal silicide layer.

Abstract: A method for producing an electromigration-resistant crystalline transition-metal silicide layer of a layer sequence, for example, to provide a micro heater includes, supplying a semiconductor substrate including an electrically insulating layer; physically depositing a transition metal on the electrically insulating layer; carrying out a plasma-enhanced chemical vapor deposition while forming an inert gas plasma; conveying monosilane to the inert gas plasma, with the monosilane decomposing into silicon and hydrogen and the silicon in the gaseous phase entering into a chemical reaction with the transition metal in order to form the electromigration-resistant crystalline transition-metal silicide layer.

Abstract: An integrated detonation element or firing element including a base member, e.g., a silicon member, and a reaction region associated therewith, is provided. The reaction region includes porous silicon and an oxidizing agent for silicon. An arrangement is provided with which a chemical reaction is initiated between the oxidizing agent and the porous silicon. The detonation or firing element is suitable principally for use in a microreactor; in a microbooster, e.g., for course correction of satellites; as a firing element in a gas generator for a belt tensioner or an airbag, e.g., in motor vehicles; or as a primer for the ignition of explosive charges.