Patents by Inventor Sabrina LOHMÜLLER

Sabrina LOHMÜLLER has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for doping semiconductor substrates by means of a co-diffusion process and doped semiconductor substrate produced by means of said method
    Patent number: 10593552
    Abstract: The invention relates to a method for doping semiconductor substrates by means of a co-diffusion process. First, semiconductor substrates are coated at least on one side with a layer containing at least one first dopant. Two of said substrates in each case are arranged in a process chamber in such a way that two of the coated sides thereof are brought in direct contact.
    Type: Grant
    Filed: December 16, 2016
    Date of Patent: March 17, 2020
    Assignee: Fraunhofer-Gesellschaft Zur Förderung der Angewandten Forschung E.V
    Inventors: Philip Rothhardt, Andreas Wolf, Sebastian Meier, Daniel Biro, Sabrina Lohmüller
  • METHOD FOR DOPING SEMICONDUCTOR SUBSTRATES BY MEANS OF A CO-DIFFUSION PROCESS AND DOPED SEMICONDUCTOR SUBSTRATE PRODUCED BY MEANS OF SAID METHOD
    Publication number: 20180374703
    Abstract: The invention relates to a method for doping semiconductor substrates by means of a co-diffusion process. First, semiconductor substrates are coated at least on one side with a layer containing at least one first dopant. Two of said substrates in each case are arranged in a process chamber in such a way that two of the coated sides thereof are brought in direct contact.
    Type: Application
    Filed: December 16, 2016
    Publication date: December 27, 2018
    Applicant: FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E. V.
    Inventors: Philip ROTHHARDT, Andreas WOLF, Sebastian MEIER, Daniel BIRO, Sabrina LOHMÜLLER