Patents by Inventor Sachie ETO

Sachie ETO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ferroelectric Device and Semiconductor Device
    Publication number: 20230389332
    Abstract: A ferroelectric device having favorable ferroelectricity is provided. The ferroelectric device includes a first conductor over a first insulator, a ferroelectric layer over the first conductor, a second conductor over the ferroelectric layer, a second insulator over the second conductor, and a third insulator surrounding the first conductor, the ferroelectric layer, the second conductor, and the second insulator. The second insulator has a function of capturing or fixing hydrogen, and the third insulator has a function of inhibiting hydrogen diffusion.
    Type: Application
    Filed: October 11, 2021
    Publication date: November 30, 2023
    Applicant: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei YAMAZAKI, Yasuhiro JINBO, Toshikazu OHNO, Yuichi SATO, Sachie ETO, Shinobu KAWAGUCHI