Abstract: A method for manufacturing a novel display apparatus is provided. The method includes a first step of forming a first electrode, a second electrode, and a first gap over an insulating film, a second step of forming a first film over the second electrode; a third step of forming a first layer overlapping with the first electrode, a fourth step of removing the first film by an etching method to form a first unit overlapping with the first electrode, a fifth step of removing a surface of the second electrode, a sixth step of forming a second film over the first layer and the second electrode, a seventh step of forming a second layer overlapping with the second electrode, and an eighth step of removing the second film by an etching method using the second layer to form a second unit overlapping with the second electrode and a second gap.

Abstract: A plasma processing apparatus for performing plasma processing of an article, comprising: a central electrode; a tubular outer electrode which is provided so as to surround the central electrode; a tubular reaction pipe which is disposed between the central electrode and the outer electrode so as to electrically insulate the central electrode and the outer electrode from each other; a gas supply device for supplying a plasma producing gas to a discharge space defined between the central electrode and the outer electrode in the reaction pipe; an AC power source for applying an AC voltage between the central electrode and the outer electrode; wherein not only the plasma producing gas is supplied to the discharge space by the gas supply device but the AC voltage is applied between the central electrode and the outer electrode by the AC power source so as to generate a glow discharge in the discharge space under atmospheric pressure such that a plasma jet is blown to the article from a blow-off outlet of the reac

Abstract: A plastic tube extruded from an extruder is conveyed through a plasma treatment apparatus. The plasma treatment apparatus is equipped with a tubular electrode body having a high-voltage side electrode and a grounded-side electrode disposed on a tubular insulator and a high frequency electric power source connected to the electrodes. When the plastic tube is conveyed through the electrode body with one end of the tube open to the atmosphere, a mixture of a glow discharge-stabilizing gas and a treating gas is fed into the other end of the tube and an alternating-current high-voltage is applied to generate a plasma region at a pressure near to atmospheric pressure in which the tube is treated with a glow discharge plasma. This method allows an interior and/or exterior surface of a plastic tube designed to convey a medical fluid to be continuously treated by a glow discharge plasma at atmospheric pressure to form an anti-thrombotic and blood-compatible film on the surface treated.

Abstract: An activated species-generating apparatus using a gaseous phase discharge used as an ozonizer and the like is provided. Wire electrodes 21a, 21b, which are obtained by coating surfaces of electrically conductive wires with a dielectric, are entangled and the resulting crowded electrodes 20a, 20b are combined to form a three-dimensional discharge range.

Abstract: This invention concerns a SiO.sub.2, SiN.sub.x protection film formed by a CVD or PVD gas phase glowing method capable of preventing melting of the matrix ingredients at the surface of a dielectric material in electric discharge of an ozone generator and it relates to a dielectric material used for an ozone generator capable of overcoming the problems for the abrasion of electrode and dielectric material or melting of ions or molecules of during electric discharge, as well as a method of forming a protection film therefor based on the finding that an SiO.sub.2 film or SiN.sub.x film can be formed easily on a surface of a predetermined electric material or, further, on a surface of electrode by processing a specific reaction gas, for example, comprising a crude gas such as SiH.sub.4, SiCl.sub.4, N.sub.2, NH.sub.