Abstract: An actuator device includes a support portion, a movable portion, a connection portion, a first wiring provided to the connection portion, a second wiring provided to the movable portion, a first insulation layer which includes a first opening exposing a surface opposite to the movable portion in a first connection part located at the movable portion in one wiring of the first and second wirings, a second insulation layer covering the first and second wirings. The other wiring of the first and second wirings is connected to the surface of the first connection part in the first opening. A region corresponding to a corner of the other wiring of the first and second wirings in a surface opposite to the movable portion in the second insulation layer is curved in a convex shape toward an opposite side to the movable portion.

Abstract: An actuator device includes a support portion, a movable portion, a connection portion which connects the movable portion to the support portion on a second axis, a first wiring which is provided on the connection portion, a second wiring which is provided on the support portion, and an insulation layer which includes a first opening exposing a surface opposite to the support portion in a first connection part located on the support portion in one of the first wiring and the second wiring and covers a corner of the first connection part. The rigidity of a first metal material forming the first wiring is higher than the rigidity of a second metal material forming the second wiring. The other wiring of the first wiring and the second wiring is connected to the surface of the first connection part in the first opening.

Abstract: An actuator device includes a support portion, a movable portion, a connection portion which connects the movable portion to the support portion on a second axis, a first wiring which is provided on the connection portion, a second wiring which is provided on the support portion, and an insulation layer which includes a first opening exposing a surface opposite to the support portion in a first connection part located on the support portion in one of the first wiring and the second wiring and covers a corner of the first connection part. The rigidity of a first metal material forming the first wiring is higher than the rigidity of a second metal material forming the second wiring. The other wiring of the first wiring and the second wiring is connected to the surface of the first connection part in the first opening.

Abstract: An actuator device includes a support portion, a movable portion, a connection portion which connects the movable portion to the support portion on a second axis, a first wiring which is provided on the connection portion, a second wiring which is provided on the support portion, and an insulation layer which includes a first opening exposing a surface opposite to the support portion in a first connection part located on the support portion in one of the first wiring and the second wiring and covers a corner of the first connection part. The rigidity of a first metal material forming the first wiring is higher than the rigidity of a second metal material forming the second wiring. The other wiring of the first wiring and the second wiring is connected to the surface of the first connection part in the first opening.

Abstract: An actuator device includes a support portion, a movable portion, a connection portion which connects the movable portion to the support portion on a second axis so that the movable portion is swingable about the second axis, a first wiring which is provided on the connection portion, and a second wiring which is provided on the support portion. The rigidity of a first metal material forming the first wiring is higher than that of a second metal material forming the second wiring. The second wiring is connected to a surface opposite to the support portion in a first connection part located on the support portion in the first connection part.

Abstract: An actuator device includes a support portion, a movable portion, a connection portion which connects the movable portion to the support portion on a second axis, a first wiring which is provided on the connection portion, a second wiring which is provided on the support portion, and an insulation layer which includes a first opening exposing a surface opposite to the support portion in a first connection part located on the support portion in one of the first wiring and the second wiring and covers a corner of the first connection part. The rigidity of a first metal material forming the first wiring is higher than the rigidity of a second metal material forming the second wiring. The other wiring of the first wiring and the second wiring is connected to the surface of the first connection part in the first opening.

Abstract: An actuator device includes a support portion, a movable portion, a connection portion which connects the movable portion to the support portion on a second axis, a first wiring which is provided on the connection portion, a second wiring which is provided on the support portion, and an insulation layer which includes a first opening exposing a surface opposite to the support portion in a first connection part located on the support portion in one of the first wiring and the second wiring and covers a corner of the first connection part. The rigidity of a first metal material forming the first wiring is higher than the rigidity of a second metal material forming the second wiring. The other wiring of the first wiring and the second wiring is connected to the surface of the first connection part in the first opening.

Abstract: A mirror drive device includes a support part, a movable part, a permanent magnet forming a magnetic field in the periphery of the movable part, and a circuit board disposed between the support part and the permanent magnet in a facing direction of a pair of principal surfaces of the movable part so as to cause the movable part to be positioned at an inside of the circuit board when viewed in the facing direction. The movable part includes a mirror disposition portion, a mirror disposed and a drive coil so as to face the permanent magnet. The support part includes a base portion connected to a connection member and a reinforcing portion extending from the base portion toward a side away from the permanent magnet and the circuit board. The drive coil is connected to electrodes by lead-out conductors.

Abstract: An actuator device includes a support portion; a first movable portion; a first torsion bar portion coupling the first movable portion to the support portion to be swingable around a first swing axis; and a wiring disposed on the first torsion bar portion. The torsion bar portion is of a meandering shape including a plurality of straight sections extending in a first direction along the first swing axis and juxtaposed in a second direction intersecting with the first direction, and a plurality of turnover sections alternately coupling two ends of the straight sections. The plurality of turnover sections have a curved shape. The wiring includes wiring sections embedded in grooves formed in the turnover sections.

Abstract: An actuator device includes a support portion, a movable portion, a connection portion which connects the movable portion to the support portion on a second axis so that the movable portion is swingable about the second axis, a first wiring which is provided on the connection portion, and a second wiring which is provided on the support portion. The rigidity of a first metal material forming the first wiring is higher than that of a second metal material forming the second wiring. The second wiring is connected to a surface opposite to the support portion in a first connection part located on the support portion in the first connection part.

Abstract: An actuator device includes a support portion, a movable portion, a connection portion which connects the movable portion to the support portion on a second axis, a first wiring which is provided on the connection portion, a second wiring which is provided on the support portion, and an insulation layer which includes a first opening exposing a surface opposite to the support portion in a first connection part located on the support portion in one of the first wiring and the second wiring and covers a corner of the first connection part. The rigidity of a first metal material forming the first wiring is higher than the rigidity of a second metal material forming the second wiring. The other wiring of the first wiring and the second wiring is connected to the surface of the first connection part in the first opening.

Abstract: A mirror drive device includes a support part, a movable part, a permanent magnet forming a magnetic field in the periphery of the movable part, and a circuit board disposed between the support part and the permanent magnet in a facing direction of a pair of principal surfaces of the movable part so as to cause the movable part to be positioned at an inside of the circuit board when viewed in the facing direction. The movable part includes a mirror disposition portion, a mirror disposed and a drive coil so as to face the permanent magnet. The support part includes a base portion connected to a connection member and a reinforcing portion extending from the base portion toward a side away from the permanent magnet and the circuit board. The drive coil is connected to electrodes by lead-out conductors.

Abstract: A torsion bar portion is of a meandering shape including a plurality of straight sections and a plurality of turnover sections. The plurality of straight sections extends in a first direction along a swing axis and is juxtaposed in a second direction intersecting with the first direction. The plurality of turnover sections alternately couples two ends of the straight sections. Wiring is disposed on the torsion bar portion. The wiring includes first wiring sections and second wiring sections. The first wiring sections include damascene wiring sections that are disposed so as to be embedded in grooves formed in the turnover sections and that are made of a first metal material including Cu. The second wiring sections are disposed on the straight sections and are made of a second metal material more resistant to plastic deformation than the first metal material.

Abstract: A mirror drive device is provided as one capable of efficiently gaining a driving force. The mirror drive device 1 has a fixed frame 5; a movable portion 7 supported so as to be swingable relative to the fixed frame 5, through torsion bars 10a, 10b extending on an identical straight line, and being of a circular shape; a mirror 9 arranged on a principal surface 7a of the movable portion 7; and a permanent magnet 3 forming a magnetic field around the movable portion 7; the movable portion 7 has a drive coil 12 arranged below the mirror 9; the drive coil 12 is of a 2n-sided polygon shape (where n is an integer of 3 or more) when viewed from a direction orthogonal to the principal surface 7a, at least one side of which is orthogonal to a direction of the magnetic field F.

Abstract: A torsion bar portion is of a meandering shape including a plurality of straight sections and a plurality of turnover sections. The plurality of straight sections extends in a first direction along a swing axis and is juxtaposed in a second direction intersecting with the first direction. The plurality of turnover sections alternately couples two ends of the straight sections. Wiring is disposed on the torsion bar portion. The wiring includes first wiring sections and second wiring sections. The first wiring sections include damascene wiring sections that are disposed so as to be embedded in grooves formed in the turnover sections and that are made of a first metal material including Cu. The second wiring sections are disposed on the straight sections and are made of a second metal material more resistant to plastic deformation than the first metal material.

Abstract: A mirror drive device is provided as one capable of efficiently gaining a driving force. The mirror drive device 1 has a fixed frame 5; a movable portion 7 supported so as to be swingable relative to the fixed frame 5, through torsion bars 10a, 10b extending on an identical straight line, and being of a circular shape; a mirror 9 arranged on a principal surface 7a of the movable portion 7; and a permanent magnet 3 forming a magnetic field around the movable portion 7; the movable portion 7 has a drive coil 12 arranged below the mirror 9; the drive coil 12 is of a 2n-sided polygon shape (where n is an integer of 3 or more) when viewed from a direction orthogonal to the principal surface 7a, at least one side of which is orthogonal to a direction of the magnetic field F.

Abstract: A torsion bar portion is of a meandering shape including a plurality of straight sections and a plurality of turnover sections. The plurality of straight sections extends in a first direction along a swing axis and is juxtaposed in a second direction intersecting with the first direction. The plurality of turnover sections alternately couples two ends of the straight sections. Wiring is disposed on the torsion bar portion. The wiring includes first wiring sections and second wiring sections. The first wiring sections include damascene wiring sections that are disposed so as to be embedded in grooves formed in the turnover sections and that are made of a first metal material including Cu. The second wiring sections are disposed on the straight sections and are made of a second metal material more resistant to plastic deformation than the first metal material.

Abstract: A mirror device includes a mirror structure including a first movable portion and a second movable portion coupled to a support portion so as to be swingable, and, a mirror, a first coil, and a second coil disposed on the movable portions; a first magnetic portion and a second magnetic portion disposed on a same side as a back surface of the mirror structure to be opposed to the mirror structure, and having a magnetic pole of a first polarity and a magnetic pole of a second polarity, respectively; and a cap structure disposed on a same side as a surface of the mirror structure. The cap structure includes a first region having a magnetic pole of the first polarity, a second region having a magnetic pole of the second polarity, and an unmagnetized third region located between the first region and the second region.

Abstract: In a linear image sensor 1 according to an embodiment of the present invention, a plurality of embedded photodiodes PD(n) of an elongated shape are arrayed. Each of the embedded photodiodes PD(n) comprises a first semiconductor region 10 of a first conductivity type; a second semiconductor region 20 formed on the first semiconductor region 10, having a low concentration of an impurity of a second conductivity type, and having an elongated shape; a third semiconductor region 30 of the first conductivity type formed on the second semiconductor region 20 so as to cover a surface of the second semiconductor region 20; and a fourth semiconductor region 40 of the second conductivity type for extraction of charge from the second semiconductor region 20; the fourth semiconductor region 40 comprises a plurality of fourth semiconductor regions arranged as separated in a longitudinal direction of the second semiconductor region on the second semiconductor region 20.

Abstract: In an image sensor 1 according to an embodiment of the present invention, a plurality of embedded photodiodes PD(m,n) are arrayed. Each of the embedded photodiodes PD(m,n) comprises a first semiconductor region 10 of a first conductivity type; a second semiconductor region 20 formed on the first semiconductor region 10 and having a low concentration of an impurity of a second conductivity type; a third semiconductor region 30 of the first conductivity type formed on the second semiconductor region 20 so as to cover a surface of the second semiconductor region 20; and a fourth semiconductor region 40 of the second conductivity type for extraction of charge from the second semiconductor region 20; the fourth semiconductor region 40 comprises a plurality of fourth semiconductor regions 40 arranged as separated, on the second semiconductor region 20.