Abstract: A chromatic confocal sensor includes a light source portion that emits a plurality of light beams having different wavelengths; an objective lens that converges the plurality of light beams at different focal positions; an emission port from which measurement light reflected by an object to be measured at the focal positions out of the plurality of light beams is emitted; a position calculation portion that calculates a position of the object to be measured based on the emitted measurement light; an observation portion including an observation light source that emits observation light and an image sensor; and a beam splitter that emits at least a part of the measurement light that passes through the objective lens to the emission port and emits at least a part of the observation light that passes through the objective lens and is reflected by the object to be measured to the image sensor.

Abstract: A measuring probe for measuring a screw groove of a relatively movable ball screw includes a light source, an objective lens formed to correspond to the screw groove of the ball screw, arranged to be opposed to the screw groove of the ball screw in a non-contact manner, and configured to emit light from the light source to the screw groove of the ball screw, and a line sensor configured to detect an interference pattern generated by reflected light from the screw groove of the ball screw and reflected light on a surface of the objective lens. This enables high-accuracy measurement of a specified area of a shape of a side surface of a relatively movable work in a non-contact manner.

Abstract: A surface texture measuring apparatus includes an X axis displacement mechanism and a Y axis displacement mechanism displacing a measurable object having an interior wall along an XY plane; a measurement sensor measuring a surface texture of the interior wall without contact; a Z axis displacement mechanism displacing the measurement sensor in a Z axis direction orthogonal to the XY plane and bringing the measurement sensor to face the interior wall; a W axis displacement mechanism displacing the measurement sensor facing the interior wall in a normal direction of the interior wall; and a ? axis displacement mechanism displacing the measurement sensor facing the interior wall along the interior wall.

Abstract: A measuring probe for measuring a screw groove of a relatively rotatable ball screw includes a stylus having a tip end portion configured to contact the screw groove, a radial-direction displacement mechanism configured to support the stylus so as for the stylus to be displaceable in an X direction toward an axial center of the ball screw, an axial-direction displacement mechanism configured to support the stylus so as for the stylus to be displaceable in an axial direction (Z direction) of the axial center, and sensors configured to detect displacement of the stylus produced by the radial-direction displacement mechanism and the axial-direction displacement mechanism. This enables high-accuracy measurement of a predetermined position of a side surface of a relatively rotatable work.

Abstract: A probe head rotation mechanism, situated between a spindle and a probe of a coordinate measurement device, includes: a main body frame supported by the spindle; a rotor supported by the main body frame so as to be capable of tilting with respect to an axial center of the spindle; the main body frame; and a motor supported by the main body frame and driving the rotor. A motor main body is arranged away from lying on the axial center of the spindle, and an axial center of the motor is oriented outward in a diameter direction of the spindle.

Abstract: A measuring force includes a stem, an arm, a detector, a rotation fulcrum, and a measuring force adjuster. A probe which makes contact with a workpiece is provided on the stem. An end portion of the arm is joined to the stem. The rotation fulcrum acts as a fulcrum for a rotating motion of the stem and the arm. The detector detects a displacement amount of the rotating motion of the arm. A crossed spring of the rotation fulcrum imparts on the stem and the arm a torque around an axis of the rotating motion in accordance with the displacement amount of the rotating motion. The measuring force adjuster imparts on the arm and the stem a torque, in a reverse direction of the torque generated by the crossed spring, by an attraction force generated by a magnetic force between at least two magnetic members mutually arranged at opposite ends.

Abstract: An XY shift mechanism can shift a rotary table in a two-dimensional direction (XY direction) orthogonal to a rotation axis of the rotary table. By collaborative control of the shift position of the rotary table in the two-dimensional direction in synchronization with the rotation of the rotary table, rotation is made possible about a virtual rotation center that is set at an arbitrary position on the rotary table. The collaborative control of the shift position of the rotary table in the two-dimensional direction also corrects rotation eccentricity owing to the eccentricity of the rotary table. Thus, the virtual rotation center can be set at an arbitrary position on the rotary table, thus enabling obtainment of high resolution tomographic images of a plurality of regions of interest of an object, without the need for repositioning of the object.

Abstract: A micrometer with good usability is provided. A micrometer has a frame with an anvil at one end and a spindle at another end, the spindle moving closer to or further away from the anvil. The frame is covered with a heat shield cover. The heat shield cover has a first anti-slip part. The first anti-slip part preferably has a plurality of protrusions.

Abstract: A form measuring instrument includes: a body; a movable member including: a stylus holder being rotatably supported by the body; a stylus being held by the stylus holder; and a tip being provided at an end of the stylus and being contactable with a workpiece surface; a measurement-force-applying unit being adapted to generate a rotation force acting on the stylus holder to bring the tip of the stylus into contact with the workpiece surface; a displacement detector being provided to a portion of the stylus holder to detect a displacement of the stylus holder resulting from a rotation thereof; and a vibration generator being adapted to apply vibration to the stylus holder.

Abstract: A surface roughness measuring unit according to the present invention includes a contact pin unit having a contact pin and a displacement detector, the contact pin being provided so as to project and retract through a through-hole of a skid and scanning and moving along a surface of a work piece, the displacement detector detecting displacement of the contact pin in a direction perpendicular to the work piece surface; a driver moving the contact pin unit forward and backward along the surface of the work piece; and a joint coupling the contact pin unit and the driver to a measurement head holder of a coordinate measuring system. The surface roughness measuring unit further includes a contact detector that detects contact of the skid on the surface of the work piece.