Abstract: According to one embodiment of the present disclosure, there can be provided a plasma processing system for multi-station, the system including a processing chamber including at least two or more stations, one plasma generator provided for each of the stations, one inverter provided for each of the plasma generators, a sensing unit configured to measure an electric characteristic of each of the plasma generators, and a controller configured to acquire sensing data from the sensing unit and control each of the inverters.

Abstract: A power supply includes an inverter configured to direct current (DC) power into alternating current (AC) power, an impedance matching circuit configured to supply the AC power to a load; and a controller configured to adjust disposition of a powering period, in which the AC power is output, and a freewheeling period, in which the AC power is not output, to adjust a power amount of the power supplied to the load through the impedance matching circuit by the inverter.

Abstract: A text messaging apparatus and method for a mobile terminal includes: transmitting a text message having a context identification number from a first mobile terminal to a second mobile terminal; receiving a response text message from the second mobile terminal in response to the text message, the response text message having a context identification number identical to that of the first text message; extracting the context identification number from the response text message; retrieving text messages linked to the context identification number; and displaying the response text message together with the retrieved text messages.