Patents by Inventor Sae Takagi

Sae Takagi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for forming a thin semiconductor film and a plasma CVD apparatus to be used in the method
    Patent number: 6009828
    Abstract: A method for producing a thin semiconductor film according to the present invention includes the steps of: placing a group-IV compound or a derivative thereof in a plasma state; decomposing the group-IV compound or the derivative thereof into active species; and depositing the active species on a substrate, wherein energy for generating plasma is intermittently supplied at a supply time interval which is equal to or less than a reciprocal of {(secondary reaction rate constant of a source gas reacting with active species other than long-life active species within the plasma).times.(number of source gas molecules)}.
    Type: Grant
    Filed: January 10, 1997
    Date of Patent: January 4, 2000
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Takashi Tomita, Katsuhiko Nomoto, Yoshihiro Yamamoto, Hitoshi Sannomiya, Sae Takagi
  • Method for forming a thin semiconductor film and a plasma CVD apparatus to be used in the method
    Patent number: 5618758
    Abstract: A method for producing a thin semiconductor film according to the present invention includes the steps of: placing a group-IV compound or a derivative thereof in a plasma state; decomposing the group-IV compound or the derivative thereof into active species; and depositing the active species on a substrate, wherein energy for generating plasma is intermittently supplied at a supply time interval which is equal to or less than a reciprocal of {(secondary reaction rate constant of a source gas reacting with active species other than long-life active species within the plasma).times.(number of source gas molecules)}.
    Type: Grant
    Filed: February 15, 1996
    Date of Patent: April 8, 1997
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Takashi Tomita, Katsuhiko Nomoto, Yoshihiro Yamamoto, Hitoshi Sannomiya, Sae Takagi