Abstract: Methods and systems for identifying outliers in multiple instances of a pattern of interest (POI) are provided. One system includes one or more computer subsystems configured for acquiring images generated by an imaging subsystem at multiple instances of a POI within a die formed on the specimen. The multiple instances include two or more instances that are located at aperiodic locations within the die. The computer subsystem(s) are also configured for determining a feature of each of the images generated at the multiple instances of the POI. In addition, the computer subsystem(s) are configured for identifying one or more outliers in the multiple instances of the POI based on the determined features.

Abstract: Methods and systems for determining one or more characteristics for defects detected on a specimen are provided. One system includes one or more computer subsystems configured for identifying a first defect that was detected on a specimen by an inspection system with a first mode but was not detected with one or more other modes. The computer subsystem(s) are also configured for acquiring, from the storage medium, one or more images generated with the one or more other modes at a location on the specimen corresponding to the first defect. In addition, the computer subsystem(s) are configured for determining one or more characteristics of the acquired one or more images and determining one or more characteristics of the first defect based on the one or more characteristics of the acquired one or more images.

Abstract: Methods and systems for adaptive sampling for semiconductor inspection recipe creation, defect review, and metrology are provided. The embodiments provide image processing and pattern recognition algorithms and an adaptive sampling method for extracting critical areas from SEM image patches for use in a wafer inspection system when design data for a semiconductor chip is not available. The embodiments also provide image processing and pattern recognition algorithms for efficiently discovering critical defects and significant deviations in the normal manufacturing process, using the output from a wafer inspection system and an adaptive sampling method to select wafer locations to be examined on a high resolution review or metrology tool.

Abstract: Inline yield monitoring may include the use of one or more modules of algorithmic software. Inline yield monitoring may include the use of two related algorithmic software modules such as a learning and a prediction module. The learning module may learn critical PET (parametric electrical test) parameters from data of probe electrical test yields and PET attribute values. The critical PET parameters may best separate outliers and inliers in the yield data. The prediction module may use the critical PET parameters found by the learning module to predict whether a wafer is an inlier or an outlier in a probe test classification.

Abstract: Methods and systems for adaptive sampling for semiconductor inspection recipe creation, defect review, and metrology are provided. The embodiments provide image processing and pattern recognition algorithms and an adaptive sampling method for extracting critical areas from SEM image patches for use in a wafer inspection system when design data for a semiconductor chip is not available. The embodiments also provide image processing and pattern recognition algorithms for efficiently discovering critical defects and significant deviations in the normal manufacturing process, using the output from a wafer inspection system and an adaptive sampling method to select wafer locations to be examined on a high resolution review or metrology tool.

Abstract: A source-address independent, multi-path routing method for use in a communication network is disclosed. A network node uses an information packet's destination address to determine a plurality of neighbors it has a proportional likelihood to forward that packet to, such that packets can be sent over multiple paths to a destination node without undesirable looping. Multiple-neighbor proportional forwarding routing tables are determined by computing a directed graph of multiple optimal paths to each destination node. Optimal paths and forwarding proportions are based on link capacities. The multi-path routing method provides maximized throughput, reduced congestion and superior load balancing over single-path routing. Source-address independence also overcomes a major problem of more traditional source-address dependent multi-path routing methods. The source-address independent, multi-path routing method can be implemented in mixed networks where some nodes do not implement the method.

Abstract: A source-address independent, multi-path routing method for use in a communication network is disclosed. A network node uses an information packet's destination address to determine a plurality of neighbors it has a proportional likelihood to forward that packet to, such that packets can be sent over multiple paths to a destination node without undesirable looping. Multiple-neighbor proportional forwarding routing tables are determined by computing a directed graph of multiple optimal paths to each destination node. Optimal paths and forwarding proportions are based on link capacities. The multi-path routing method provides maximized throughput, reduced congestion and superior load balancing over single-path routing. Source-address independence also overcomes a major problem of more traditional source-address dependent multi-path routing methods. The source-address independent, multi-path routing method can be implemented in mixed networks where some nodes do not implement the method.

Abstract: A source-address independent, multi-path routing method for use in a communication network is disclosed. A network node uses an information packet's destination address to determine a plurality of neighbors it has a proportional likelihood to forward that packet to, such that packets can be sent over multiple paths to a destination node without undesirable looping. Multiple-neighbor proportional forwarding routing tables are determined by computing a directed graph of multiple optimal paths to each destination node. Optimal paths and forwarding proportions are based on link capacities. The multi-path routing method provides maximized throughput, reduced congestion and superior load balancing over single-path routing. Source-address independence also overcomes a major problem of more traditional source-address dependent multi-path routing methods. The source-address independent, multi-path routing method can be implemented in mixed networks where some nodes do not implement the method.

Abstract: The present invention comprises systems and devices for sequencing of nucleic acid, such as short DNA sequences from clonally amplified single-molecule arrays.

Abstract: A transit device and system that include a first link configured to receive a plurality of packets, and a second link communicatively coupled to the first link via a slow protocol filter. The plurality of packets include a first type of packet (e.g., data packets) and a second type of packet (e.g., slow protocol control packets). The transit device also includes a slow protocol filter that couples the first link to the second link, with the slow protocol filter being coupled to a local slow protocol client (e.g., local host CPU). Moreover, the slow protocol filter is configured to receive the plurality of packets from the first link, and to determine whether each of the plurality of packets is of the first type or the second type. The slow protocol filter also is configured to transmit each of the plurality of packets that are of the first type to the second link, and to transmit each of the plurality of packets that are the second type to the local slow protocol client.

Abstract: A transit device and system that include a first link configured to receive a plurality of packets, and a second link communicatively coupled to the first link via a slow protocol filter. The plurality of packets include a first type of packet (e.g., data packets) and a second type of packet (e.g., slow protocol control packets). The transit device also includes a slow protocol filter that couples the first link to the second link, with the slow protocol filter being coupled to a local slow protocol client (e.g., local host CPU). Moreover, the slow protocol filter is configured to receive the plurality of packets from the first link, and to determine whether each of the plurality of packets is of the first type or the second type. The slow protocol filter also is configured to transmit each of the plurality of packets that are of the first type to the second link, and to transmit each of the plurality of packets that are the second type to the local slow protocol client.

Abstract: Methods, defect review tools, and systems for locating a defect in a defect review process are provided. One method includes acquiring one or more images and data from an inspection tool. The one or more images illustrate an area on a specimen in which a defect to be reviewed is located. The data indicates a position and features of the defect within the area. The method also includes acquiring one or more additional images of the specimen proximate the position of the defect indicated in the data using an imaging subsystem of a defect review tool. In addition, the method includes identifying a portion of the one or more additional images that corresponds to the one or more images. The method further includes determining a position of the defect within the portion of the one or more additional images using the data.

Abstract: The present invention comprises systems and devices for sequencing of nucleic acid, such as short DNA sequences from clonally amplified single-molecule arrays.

Abstract: Methods, defect review tools, and systems for locating a defect in a defect review process are provided. One method includes acquiring one or more images and data from an inspection tool. The one or more images illustrate an area on a specimen in which a defect to be reviewed is located. The data indicates a position and features of the defect within the area. The method also includes acquiring one or more additional images of the specimen proximate the position of the defect indicated in the data using an imaging subsystem of a defect review tool. In addition, the method includes identifying a portion of the one or more additional images that corresponds to the one or more images. The method further includes determining a position of the defect within the portion of the one or more additional images using the data.

Abstract: A transit device and system that include a first link configured to receive a plurality of packets, and a second link communicatively coupled to the first link via a slow protocol filter. The plurality of packets include a first type of packet (e.g., data packets) and a second type of packet (e.g., slow protocol control packets). The transit device also includes a slow protocol filter that couples the first link to the second link, with the slow protocol filter being coupled to a local slow protocol client (e.g., local host CPU). Moreover, the slow protocol filter is configured to receive the plurality of packets from the first link, and to determine whether each of the plurality of packets is of the first type or the second type. The slow protocol filter also is configured to transmit each of the plurality of packets that are of the first type to the second link, and to transmit each of the plurality of packets that are the second type to the local slow protocol client.

Abstract: A method and system that optionally allows a user to view image defects organized by natural groupings based on features of the images. The natural groupings make it easier for the user to organize some or all of the images into classes in a training set of images. A feature vector is extracted from each image in the training set and stored, along with its user-specified class, for use by an automatic classifier software module. The automatic classifier uses the stored feature vectors and classes to automatically classify images not in the training set. If the automatically classified images do not match images manually classified by the user, the user modifies the training set until a better result is obtained from the automatic classifier. The system can provide feedback to an inspection system designed to aid in the setup and fine-tuning of the inspection system.