Patents by Inventor Salvator F. Pavone

Salvator F. Pavone has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for conditioning a microelectronics device deposition chamber
    Patent number: 7601639
    Abstract: The present invention provides, in one aspect, the present invention provides, in one embodiment, a method of conditioning a deposition chamber 100. This method comprises placing an undercoat on the walls of a deposition chamber 100 and depositing a pre-deposition coat over the undercoat with a plasma gas mixture conducted at a high pressure and with high gas flow.
    Type: Grant
    Filed: June 7, 2007
    Date of Patent: October 13, 2009
    Assignee: Texas Instruments Incorporated
    Inventors: Salvator F. Pavone, Jason J New
  • Method for conditioning a microelectronics device deposition chamber
    Patent number: 7241690
    Abstract: The present invention provides, in one aspect, a method of conditioning a deposition chamber 100. An undercoat is placed on the walls of a deposition chamber 100 and a pre-deposition coat is deposited over the undercoat with a plasma gas mixture conducted at a high pressure and with high gas flow.
    Type: Grant
    Filed: April 12, 2005
    Date of Patent: July 10, 2007
    Assignee: Texas Instruments Incorporated
    Inventors: Salvator F. Pavone, Jason J. New