Abstract: An automated photomask storage and retrieval system includes a plurality of mobile storage units aligned in a first direction. Each mobile storage unit is movable in the first direction and includes a plurality of storage cells. A gantry is disposed over the plurality of mobile storage units. The gantry includes a supporting frame movable in the first direction. The plurality of mobile storage units interpose a pair of supporting members of the supporting frame. A beam connects the pair of supporting members and is movable along the pair of supporting members in a second direction perpendicular to the first direction. The beam includes a plurality of buffer cells. A robotic arm is disposed adjacent to the plurality of buffer cells and movable along the beam. The robotic arm is configured to transfer a container containing a photomask between a storage cell and a buffer cell.

Abstract: An automated photomask storage and retrieval system includes a plurality of mobile storage units aligned in a first direction. Each mobile storage unit is movable in the first direction and includes a plurality of storage cells. A gantry is disposed over the plurality of mobile storage units. The gantry includes a supporting frame movable in the first direction. The plurality of mobile storage units interpose a pair of supporting members of the supporting frame. A beam connects the pair of supporting members and is movable along the pair of supporting members in a second direction perpendicular to the first direction. The beam includes a plurality of buffer cells. A robotic arm is disposed adjacent to the plurality of buffer cells and movable along the beam. The robotic arm is configured to transfer a container containing a photomask between a storage cell and a buffer cell.

Abstract: An automated photomask storage and retrieval system includes a plurality of mobile storage units aligned in a first direction. Each mobile storage unit is movable in the first direction and includes a plurality of storage cells. A gantry is disposed over the plurality of mobile storage units. The gantry includes a supporting frame movable in the first direction. The plurality of mobile storage units interpose a pair of supporting members of the supporting frame. A beam connects the pair of supporting members and is movable along the pair of supporting members in a second direction perpendicular to the first direction. The beam includes a plurality of buffer cells. A robotic arm is disposed adjacent to the plurality of buffer cells and movable along the beam. The robotic arm is configured to transfer a container containing a photomask between a storage cell and a buffer cell.

Abstract: An automated photomask storage and retrieval system includes a plurality of mobile storage units aligned in a first direction. Each mobile storage unit is movable in the first direction and includes a plurality of storage cells. A gantry is disposed over the plurality of mobile storage units. The gantry includes a supporting frame movable in the first direction. The plurality of mobile storage units interpose a pair of supporting members of the supporting frame. A beam connects the pair of supporting members and is movable along the pair of supporting members in a second direction perpendicular to the first direction. The beam includes a plurality of buffer cells. A robotic arm is disposed adjacent to the plurality of buffer cells and movable along the beam. The robotic arm is configured to transfer a container containing a photomask between a storage cell and a buffer cell.

Abstract: A devices cage comprises a first wall having m parallel channels across a length of the first wall and a second wall having n parallel channels across a length of the second wall. In some embodiments, n is at least equal to m. Each parallel channel is equal to a diameter of a head of a drive mounting screw. The first wall comprises at least one bridge positioned across each m parallel channel and at least one clamp spring integrally coupled to a top of each m parallel channel. The second wall also comprises at least one bridge positioned across each n parallel channel. Each end of the m parallel channel extends at an inwards slant toward a center of the first wall. The inwards slant terminates at a circular area around configured in a dome shape with a flat top.

Abstract: A devices cage comprises a first wall having m parallel channels across a length of the first wall and a second wall having n parallel channels across a length of the second wall. In some embodiments, n is at least equal to m. Each parallel channel is equal to a diameter of a head of a drive mounting screw. The first wall comprises at least one bridge positioned across each m parallel channel and at least one clamp spring integrally coupled to a top of each m parallel channel. The second wall also comprises at least one bridge positioned across each n parallel channel. Each end of the m parallel channel extends at an inwards slant toward a center of the first wall. The inwards slant terminates at a circular area around configured in a dome shape with a flat top.