Patents by Inventor Sam O'Mullane

Sam O'Mullane has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Metallic gratings and measurement methods thereof
    Patent number: 10883924
    Abstract: There is set forth herein in one embodiment, a structure including a metallic grating having a grating pattern, the metallic grating including a critical dimension. The metallic grating can output a spectral profile when exposed to electromagnetic radiation, the spectral profile having a feature. The grating pattern can be configured so that a change of the critical dimension produces a shift in a value of the feature of the spectral profile. A method can include propagating input electromagnetic radiation onto a metallic grating having a two dimensional periodic grating pattern and measuring a critical dimension of the metallic grating using output electromagnetic radiation from the metallic grating.
    Type: Grant
    Filed: September 8, 2015
    Date of Patent: January 5, 2021
    Assignee: THE RESEARCH FOUNDATION OF STATE UNIVERSITY OF NEW YORK
    Inventors: Sam O' Mullane, Alain C. Diebold, Brennan Peterson, Nicholas Keller
  • METALLIC GRATINGS AND MEASUREMENT METHODS THEREOF
    Publication number: 20160069792
    Abstract: There is set forth herein in one embodiment, a structure including a metallic grating having a grating pattern, the metallic grating including a critical dimension. The metallic grating can output a spectral profile when exposed to electromagnetic radiation, the spectral profile having a feature. The grating pattern can be configured so that a change of the critical dimension produces a shift in a value of the feature of the spectral profile. A method can include propagating input electromagnetic radiation onto a metallic grating having a two dimensional periodic grating pattern and measuring a critical dimension of the metallic grating using output electromagnetic radiation from the metallic grating.
    Type: Application
    Filed: September 8, 2015
    Publication date: March 10, 2016
    Inventors: Sam O'Mullane, Alain C. Diebold, Brennan Peterson, Nicholas Keller