Patents by Inventor Sam-Woong Kim

Sam-Woong Kim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ion implanter, internal structure of ion implanter and method of forming a coating layer in the ion implanter
    Patent number: 8080813
    Abstract: An ion implanter includes a process chamber and a coating layer. The process chamber receives a substrate and provides a space to perform an ion implantation process on the substrate. The coating layer is disposed on an inner wall of the process chamber to reduce contamination of the substrate and includes the same material as that of the substrate.
    Type: Grant
    Filed: July 3, 2008
    Date of Patent: December 20, 2011
    Assignee: Komico Ltd.
    Inventors: Kyung-Ic Jang, Kyung-Hwan Ye, Sam-Woong Kim, Yong-Sup Reim
  • Ion Implanter, Internal Structure of Ion Implanter and Method of Forming A Coating Layer in the Ion Implanter
    Publication number: 20100327191
    Abstract: An ion implanter includes a process chamber and a coating layer. The process chamber receives a substrate and provides a space to perform an ion implantation process on the substrate. The coating layer is disposed on an inner wall of the process chamber to reduce contamination of the substrate and includes the same material as that of the substrate.
    Type: Application
    Filed: July 3, 2008
    Publication date: December 30, 2010
    Applicant: KoMiCo LTD
    Inventors: Kyung-Ic Jang, Kyung-Hwan Ye, Sam-Woong Kim, Yong-Sup Reim