Abstract: An apparatus for chemical mechanical polishing includes a platen having a surface to support a polishing pad, a carrier head to hold a substrate against a polishing surface of the polishing pad, a pad conditioner to hold a conditioning disk against the polishing surface, an in-situ polishing pad thickness monitoring system, and a controller. The controller is configured to store data associating each of a plurality of conditioner disk products with a respective threshold value, receive an input selecting a conditioner disk product from the plurality of conditioner disk products, determine a particular threshold value associated with the selected conditioner disk product, receive a signal from the monitoring system, generate a measure of a pad cut rate from the signal, and generate an alert if the pad cut rate falls beyond the particular threshold value.

Abstract: A method includes determining durations of a plurality of processes in a sequence of processes to be performed by a substrate processing system. Each process is performed by a subsystem of the substrate processing system. The method further includes determining a duration for a process of the plurality of processes that is a longest duration among the durations. The method further includes calculating a pace for the substrate processing system based at least in part on the determined first duration. The method further includes causing multiple substrates to be introduced sequentially into the substrate processing system at the calculated pace for execution of the first sequence of processes with respect to each of the multiple substrates.

Abstract: A polishing system includes a housing having sidewalls and a ceiling to form a polishing chamber, a platen located in the chamber to support a polishing pad, a carrier head located in the chamber to hold a substrate, a motor to generate relative motion between the platen and the carrier head, a polishing liquid dispenser having a polishing liquid supply line in fluid communication with a reservoir positioned outside the housing, and a shield positioned inside the chamber. The shield has a backing plate having a flat inner surface facing the platen, and a laminate of a plurality of individually peelable layers attached to the inner surface of the backing plate.

Abstract: Techniques for database replication include a method performed by at least one hardware processor of a resource management node. The method includes detecting a request that a database instance of a database stored at a first network deployment is available at a second network deployment. Responsive to the request, the second network deployment is provisioned with a plurality of data objects. A first data object of the plurality of data objects includes a database shell. The database shell is reconfigured as the database instance of the database based on pushing data of the database into the database shell. Access to the database instance at the second network deployment is authorized based on at least a second data object of the plurality of data objects.

Abstract: Embodiments herein include carrier loading stations and methods related thereto which may be used to beneficially remove nano-scale and/or micron-scale particles adhered to a bevel edge of a substrate before polishing of the substrate. By removing such contaminates, e.g., loosely adhered particles of dielectric material, from the bevel edge, contamination of the polishing interface can be avoided thus preventing and/or substantially reducing scratch related defectivity associated therewith.

Abstract: A system for processing database entries includes a memory configured to store a database including multiple line item database entries and multiple receipt entries, a display including a user interface and a processor configured to execute instructions. The instructions include receiving a member identifier, obtaining at least a portion of the multiple line item database entries corresponding to the received member identifier, displaying the obtained multiple line item database entries, receiving a selection of one of the multiple receipt entries, and displaying an image of the selected receipt entry. The instructions further include receiving a selection of a location on the displayed image of the selected receipt entry, receiving a selection of one of the displayed multiple line item database entries, and storing, in the database, a relational link between the selected location on the displayed image of the selected receipt entry and the selected line item database entry.

Abstract: Techniques for database replication include a method performed by at least one hardware processor of a resource management node. The method includes detecting a request that a database instance of a database stored at a first network deployment is available at a second network deployment. Responsive to the request, the second network deployment is provisioned with a plurality of data objects. A first data object of the plurality of data objects includes a database shell. The database shell is reconfigured as the database instance of the database based on pushing data of the database into the database shell. Access to the database instance at the second network deployment is authorized based on at least a second data object of the plurality of data objects.

Abstract: Techniques for remote deployment replication using data objects preparation objects include detecting at an account of a data provider at the remote deployment, a replication request for availability of an instance of a primary deployment database to account of a data consumer at the remote deployment. Responsive to the replication request, the account of the data provider at the remote deployment is provisioned with a plurality of data objects associated with the primary deployment database. A refresh operation is invoked using at least one data object of the plurality of data objects at the remote deployment, to generate the instance of the primary deployment database in the account of the data consumer.

Abstract: Techniques for database replication for a remote deployment include a method performed by a data platform executing instructions on at least one hardware processor. The method includes detecting receipt of a database replication request associated with a data consumer. The database replication request is requesting availability of an instance of a primary deployment database at a remote deployment of a data platform. In response to detecting the receipt of the database replication request, an account of a data provider at the remote deployment of the data platform is provisioned with a set of replication-preparation objects associated with the primary deployment database. A database refresh operation is invoked, causing database data be pushed from the primary deployment database to a database shell in the account of the data provider at the remote deployment, to create the instance of the primary deployment database.

Abstract: Techniques for database replication using replication preparation objects include storing, by at least one hardware processor, at least one task object at a remote deployment of a data provider. A replication request originating from an account of a data consumer is detected at the remote deployment using the at least one task object. The replication request is associated with a database available at a primary deployment of the data provider. Responsive to the detecting of the replication request, a local instance of the database is generated at the remote deployment. The account of the data consumer at the remote deployment is configured to access the local instance of the database.

Abstract: A chemical mechanical polishing apparatus has a heating system, a purge gas source, a purge liquid source, and a controller. The heating system includes a source of heated gas, an arm extending over a platen, and a manifold in the arm with an a plurality of openings positioned over the platen and separated from a polishing pad for delivering the heated gas onto the polishing pad. The controller is configured to cause the heated gas to flow from the source of heated gas through the manifold and the plurality of openings to heat the polishing pad during a polishing operation, and to cause the apparatus to perform a purging operation which alternates between flowing purge gas from the purge gas source and flowing purge liquid from the purge liquid source through the manifold and the plurality of openings.

Abstract: Embodiments of the present disclosure describe techniques for monitoring usage of data listings and pricing data listings based thereon. Metadata comprising a pricing plan may be added to a data listing to generate a monetized data listing. The monetized data listing may be imported to the consumer account. The usage data of the monetized data listing and listing data of the monetized data listing may be exported to a data warehousing and analysis module. A usage level for a set of jobs processed using the monetized data listing during a current incremental interval of a current billing interval may be calculated and combined with a usage level of all previous incremental intervals of the current billing interval to generate a cumulative usage record. An invoice for the billing interval may be generated based on the cumulative usage record.

Abstract: Embodiments of the present disclosure describe techniques for monitoring usage of data listings and pricing data listings based thereon. Metadata comprising a pricing plan may be added to a data listing to generate a monetized data listing. The monetized data listing may be imported to the consumer account. The usage data of the monetized data listing and listing data of the monetized data listing may be exported to a data warehousing and analysis module. A usage level for a set of jobs processed using the monetized data listing during a current incremental interval of a current billing interval may be calculated and combined with a usage level of all previous incremental intervals of the current billing interval to generate a cumulative usage record. An invoice for the billing interval may be generated based on the cumulative usage record.

Abstract: Techniques for database replication for a remote deployment include a method performed by a data platform executing instructions on at least one hardware processor. The method includes detecting receipt of a database replication request associated with a data consumer. The database replication request is requesting availability of an instance of a primary deployment database at a remote deployment of a data platform. In response to detecting the receipt of the database replication request, an account of a data provider at the remote deployment of the data platform is provisioned with a set of replication-preparation objects associated with the primary deployment database. A database refresh operation is invoked, causing database data be pushed from the primary deployment database to a database shell in the account of the data provider at the remote deployment, to create the instance of the primary deployment database.

Abstract: An apparatus for chemical mechanical polishing includes a platen having a surface to support a polishing pad, a carrier head to hold a substrate against a polishing surface of the polishing pad, a pad conditioner to hold a conditioning disk against the polishing surface, an in-situ polishing pad thickness monitoring system, and a controller. The controller is configured to store data associating each of a plurality of conditioner disk products with a respective threshold value, receive an input selecting a conditioner disk product from the plurality of conditioner disk products, determine a particular threshold value associated with the selected conditioner disk product, receive a signal from the monitoring system, generate a measure of a pad cut rate from the signal, and generate an alert if the pad cut rate falls beyond the particular threshold value.

Abstract: Techniques for database configurations for remote deployments include a method performed by a data platform executing instructions on at least one processor. The method includes provisioning by at least one hardware processor, a remote deployment of a data platform with a plurality of objects. The plurality of objects includes at least one task object associated with a primary deployment of the data platform. The method further includes detecting using the at least one task object of the plurality of objects, a request to replicate a database stored at the primary deployment of the data platform at the remote deployment. Responsive to the request, database data is pushed from the database stored at the primary deployment to at least a second object of the plurality of objects provisioned at the remote deployment.

Abstract: An apparatus for chemical mechanical polishing includes a platen having a surface to support a polishing pad, a carrier head to hold a substrate against a polishing surface of the polishing pad, a pad conditioner to hold a conditioning disk against the polishing surface, an in-situ polishing pad thickness monitoring system, and a controller. The controller is configured to store data associating each of a plurality of conditioner disk products with a respective threshold value, receive an input selecting a conditioner disk product from the plurality of conditioner disk products, determine a particular threshold value associated with the selected conditioner disk product, receive a signal from the monitoring system, generate a measure of a pad cut rate from the signal, and generate an alert if the pad cut rate falls beyond the particular threshold value.

Abstract: A system for processing database entries includes a memory configured to store a database including multiple line item database entries and multiple receipt entries, a display including a user interface and a processor configured to execute instructions. The instructions include receiving a member identifier, obtaining at least a portion of the multiple line item database entries corresponding to the received member identifier, displaying the obtained multiple line item database entries, receiving a selection of one of the multiple receipt entries, and displaying an image of the selected receipt entry. The instructions further include receiving a selection of a location on the displayed image of the selected receipt entry, receiving a selection of one of the displayed multiple line item database entries, and storing, in the database, a relational link between the selected location on the displayed image of the selected receipt entry and the selected line item database entry.

Abstract: Techniques for database replication using replication preparation objects include storing, by at least one hardware processor, at least one task object at a remote deployment of a data provider. A replication request originating from an account of a data consumer is detected at the remote deployment using the at least one task object. The replication request is associated with a database available at a primary deployment of the data provider. Responsive to the detecting of the replication request, a local instance of the database is generated at the remote deployment. The account of the data consumer at the remote deployment is configured to access the local instance of the database.

Abstract: Techniques for database configurations for remote deployments include a method performed by a data platform executing instructions on at least one processor. The method includes provisioning by at least one hardware processor, a remote deployment of a data platform with a plurality of objects. The plurality of objects includes at least one task object associated with a primary deployment of the data platform. The method further includes detecting using the at least one task object of the plurality of objects, a request to replicate a database stored at the primary deployment of the data platform at the remote deployment. Responsive to the request, database data is pushed from the database stored at the primary deployment to at least a second object of the plurality of objects provisioned at the remote deployment.