Abstract: A method and processing chamber for plenum driven hydroxyl combustion oxidation. A mixture is produced in a plenum. The mixture includes a first reactive gas injected from a first inlet and a second reactive gas injected from a second inlet. The mixture is injected towards a substrate of a processing chamber at a jet gas velocity greater than a flame gas velocity. A radical is produced as a function of the first gas and the second gas while heating the chamber.

Abstract: The present disclosure generally relates to modulating pressure within an inner chamber of a processing chamber and/or modulating velocity of a processing gas. The processing chamber comprises a chamber, a gas inlet configured to flow processing gas into the chamber, an exhaust configured to remove processing gas from the chamber, a substrate holder disposed between the gas inlet and the exhaust, and a first injector configured to pulse inert or process gas into the chamber. In one embodiment, the processing chamber further comprises a second injector configured to pulse the inert gas into the chamber, where the first injector pulses inert gas before the substrate holder and the second injector pulses inert gas after the substrate holder. In another embodiment, the processing chamber comprises a pressure control valve configured to close or partially close being processing of a substrate to constrict the exhaust.

Abstract: A method and processing chamber for plenum driven hydroxyl combustion oxidation. A mixture is produced in a plenum. The mixture includes a first reactive gas injected from a first inlet and a second reactive gas injected from a second inlet. The mixture is injected towards a substrate of a processing chamber at a jet gas velocity greater than a flame gas velocity. A radical is produced as a function of the first gas and the second gas while heating the chamber.

Abstract: A method of conditioning MoCl5 comprises heating a container of MoCl5 to a temperature ranging from approximately 140° C. to 190° C. for a period ranging from approximately 2 hours to approximately 100 hours to produce a MoCl5-containing composition comprising approximately 10% weight to approximately 60% weight of Phase 1 MoCl5 and 90% weight to approximately 40% weight of Phase 2 MoCl5 as determined by X-ray diffraction. This MoCl5-containing composition is expected to be more thermally stable and provides stable vapor supply.

Abstract: The disclosure provides a system and methods of performing a cyclic growth oxidation process. The method includes forming a plasma of a plasma gas using a remote plasma source fluidly coupled to a conduit coupled to a first nozzle of a processing chamber. An oxidation radical is produced. A first oxidation process is performed by introducing the oxidation radical for a first period of time to the processing chamber using the first nozzle. A bake process is performed for a second period of time. A second oxidation process is performed by introducing the oxidation radical for a third period of time.

Abstract: Systems and methods for hydroxyl driven combustion include introducing a first gas via at least a first orifice into a processing chamber having a substrate disposed on a substrate support. A second gas is introduced into the processing chamber via a plurality of second orifices. The plurality of first orifices and the plurality of second orifices are oriented in an alternating pattern such that each second orifice of the plurality of second orifices is at least partially surrounded by at least a first orifice of the plurality of first orifices. A radical is produced as a function of the first gas and the second gas while heating the chamber.

Abstract: A method and processing chamber for plenum driven hydroxyl combustion oxidation. A mixture is produced in a plenum. The mixture includes a first reactive gas injected from a first inlet and a second reactive gas injected from a second inlet. The mixture is injected towards a substrate of a processing chamber at a jet gas velocity greater than a flame gas velocity. A radical is produced as a function of the first gas and the second gas while heating the chamber.

Abstract: Systems and methods of orifice driven hydroxyl combustion oxidation include introducing a first gas via at least a first orifice into a processing chamber having a substrate disposed on a substrate support. A second gas is introduced into the processing chamber via a plurality of second orifices. The plurality of second orifices are oriented substantially perpendicular to the at least a first orifice. A radical is produced as a function of the first gas and the second gas while heating the chamber.

Abstract: A method of conditioning MoCl5 comprises heating a container of MoCl5 to a temperature ranging from approximately 140° C. to 190° C. for a period ranging from approximately 2 hours to approximately 100 hours to produce a MoCl5-containing composition comprising approximately 10% weight to approximately 60% weight of Phase 1 MoCl5 and 90% weight to approximately 40% weight of Phase 2 MoCl5 as determined by X-ray diffraction. This MoCl5-containing composition is expected to be more thermally stable and provides stable vapor supply.

Abstract: Embodiments of the present disclosure describe a negative photochromatic material. Embodiments of the present disclosure further describe a method of tuning a negative photochromatic material comprising selecting an amine donor group, selecting an acceptor group, and contacting at least the selected amine donor group and the selected acceptor group to form a negative photochromatic material, wherein one or more of the selected amine donor group and the selected acceptor group tune at least an absorption range of the negative photochromatic material.