Abstract: According to embodiments of the invention, an integrated configuration, flow and execution systems (ICFES) may be used to specify, control and record a history of processing of both semiconductor device experimental lots and production lots of wafers. Moreover, the system allows combining of one or more partial flows of pre-existing flow blocks, and special processing into another processing flow block. A lot plan can be created that includes the flow block, and the lot plan can be updated to include partial flows and special processing before or during processing of the lot plan.

Abstract: A method, apparatus and system for communicating in a wireless mesh network may entail receiving a multi-receiver single body broadcast (MRSSB) medium access control (MAC) frame at a mesh node. The MAC frame may include a multiple receiver address field, a previously addressed neighbor field and a message sequence number field, which may be used by the receiving node to know whether it has already received this frame and if not, generate a forwarding frame to forward the data of the received frame but addressed to neighboring nodes except for those which are likely to have previously received the message already. Various embodiments and implementations are also disclosed.