Patents by Inventor Samir A. Afif

Samir A. Afif has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer polishing apparatus and process
    Patent number: 6340327
    Abstract: An apparatus and method for polishing a workpiece including a polishing pad; at least one polishing arm for holding a workpiece to be polished on the polishing pad; at least one conditioning arm for conditioning the polishing pad; and, a slurry dispenser. The slurry dispenser is disposed between the at least one polishing arm and the at least one conditioning arm so that slurry dispensed by the slurry dispenser contacts the at least one conditioning pad before it contacts the at least one polishing pad.
    Type: Grant
    Filed: October 15, 1999
    Date of Patent: January 22, 2002
    Assignee: Agere Systems Guardian Corp.
    Inventor: Samir A. Afif
  • Bearing substitute for wafer polishing arm
    Patent number: 6250991
    Abstract: An apparatus and method for polishing a workpiece including a polishing pad, and at least one polishing arm for holding a workpiece to be polished on the polishing pad. The polishing arm includes at least one plastic bearing. The plastic bearing prevents lock up of a vacuum chuck coupled to the polishing arm because it is impervious to slurry which often becomes lodged in conventional ball bearings.
    Type: Grant
    Filed: October 15, 1999
    Date of Patent: June 26, 2001
    Assignee: Agere Systems Guardian Corp.
    Inventor: Samir A. Afif