Abstract: Methods and systems for realizing a high throughput wafer positioning system with high positioning accuracy are presented herein. The high throughput, high accuracy wafer positioning system is employed to measure structural and material characteristics (e.g., material composition, dimensional characteristics of structures and films, etc.) associated with different semiconductor fabrication processes. In one aspect, iron core linear motor assemblies are arranged in a magnetically opposed configuration such that the magnetic attraction forces inherent to each opposing iron core linear motor assembly largely cancel one another. The reduced force applied to sensitive stage frame elements, in turn, reduces induced deformations and stage positioning errors. In some embodiments, a wafer positioning system includes stacked magnetically opposed long stroke stages.

Abstract: An instrument port for introducing instruments into a surgical site, including a port body having a channel running therethrough from a proximal end to a distal end, an instrument sleeve in slidable contact with the channel, creating a gap therebetween, and fluid flow for removing emboli efficiently from the instrument port, wherein the fluid flow includes the gap is provided. A fluid flow system for use in an instrument port is provided. A method of removably securing an instrument sleeve to a port body by anchoring the instrument port to heart tissue, making at least one flood line in a channel, flushing out emboli, and performing surgery with the instrument port.

Abstract: A system includes a torque sensor; and a hybrid power system. The hybrid power sensor includes a frame; an engine mounted on the frame; and a generator, the generator including: a generator rotor mechanically coupled to a shaft of the engine; and a generator stator coupled to the frame by the torque sensor. The torque sensor is configured to measure a torque on the generator stator.

Abstract: An unmanned aerial vehicle includes at least one rotor motor configured to drive at least one propeller to rotate; a passenger compartment sized to contain a human or animal passenger; and a hybrid generator system configured to provide power to the at least one rotor motor and to generate lift sufficient to carry the human or animal passenger. The hybrid generator system includes a rechargeable battery configured to provide power to the at least one rotor motor; an engine configured to generate mechanical power; and a generator motor coupled to the engine and configured to generate electrical power from the mechanical power generated by the engine.

Abstract: An unmanned aerial vehicle includes at least one rotor motor configured to drive at least one propeller to rotate; a passenger compartment sized to contain a human or animal passenger; and a hybrid generator system configured to provide power to the at least one rotor motor and to generate lift sufficient to carry the human or animal passenger. The hybrid generator system includes a rechargeable battery configured to provide power to the at least one rotor motor; an engine configured to generate mechanical power; and a generator motor coupled to the engine and configured to generate electrical power from the mechanical power generated by the engine.

Abstract: An unmanned aerial vehicle includes multiple rotor arms; a rotor disposed at an end of each of the multiple rotor arms; and an adjustment component configured to enable a first rotor arm to move relative to a second rotor arm.

Abstract: An aerial vehicle includes a hybrid power generation system comprising an engine; a generator mechanically coupled to the engine; and a propulsion system comprising an electric motor electrically coupled to the generator and a rotational mechanism coupled to the electric motor.

Abstract: An unmanned aerial vehicle includes multiple rotor arms; a rotor disposed at an end of each of the multiple rotor arms; and an adjustment component configured to enable a first rotor arm to move relative to a second rotor arm.

Abstract: An unmanned aerial vehicle includes at least one rotor motor configured to drive at least one propeller to rotate; a passenger compartment sized to contain a human or animal passenger; and a hybrid generator system configured to provide power to the at least one rotor motor and to generate lift sufficient to carry the human or animal passenger. The hybrid generator system includes a rechargeable battery configured to provide power to the at least one rotor motor; an engine configured to generate mechanical power; and a generator motor coupled to the engine and configured to generate electrical power from the mechanical power generated by the engine.

Abstract: An unmanned aerial vehicle includes at least one rotor motor configured to drive at least one propeller to rotate. The unmanned aerial vehicle includes a data center including a processor; a data storage component; and a wireless communications component. The unmanned aerial vehicle includes a hybrid generator system configured to provide power to the at least one rotor motor and to the data center, the hybrid generator system including a rechargeable battery configured to provide power to the at least one rotor motor; an engine configured to generate mechanical power; and a generator motor coupled to the engine and configured to generate electrical power from the mechanical power generated by the engine. The data center may include an intelligent data management module configured to control power distribution and execution of mission tasks in response to available power generation and mission task priorities.

Abstract: An aerial vehicle includes a hybrid power generation system comprising an engine; a generator mechanically coupled to the engine; and a propulsion system comprising an electric motor electrically coupled to the generator and a rotational mechanism coupled to the electric motor.

Abstract: A system includes a torque sensor; and a hybrid power system. The hybrid power sensor includes a frame; an engine mounted on the frame; and a generator, the generator including: a generator rotor mechanically coupled to a shaft of the engine; and a generator stator coupled to the frame by the torque sensor. The torque sensor is configured to measure a torque on the generator stator.

Abstract: A vehicle includes a wheel; a hybrid power generation system including an engine and a generator mechanically coupled to the engine; and a propulsion system including an electric motor electrically coupled to the generator and mechanically coupled to the wheel.

Abstract: An aerial vehicle includes a hybrid power generation system comprising an engine; a generator mechanically coupled to the engine; and a propulsion system comprising an electric motor electrically coupled to the generator and a rotational mechanism coupled to the electric motor.

Abstract: An unmanned aerial vehicle includes at least one rotor motor configured to drive at least one propeller to rotate. The unmanned aerial vehicle includes a data center including a processor; a data storage component; and a wireless communications component. The unmanned aerial vehicle includes a hybrid generator system configured to provide power to the at least one rotor motor and to the data center, the hybrid generator system including a rechargeable battery configured to provide power to the at least one rotor motor; an engine configured to generate mechanical power; and a generator motor coupled to the engine and configured to generate electrical power from the mechanical power generated by the engine. The data center may include an intelligent data management module configured to control power distribution and execution of mission tasks in response to available power generation and mission task priorities.

Abstract: The instrument ports for introducing instruments into a surgical site that are disclosed herein include a port body having a channel running therethrough from a proximal end to a distal end, an instrument sleeve in slidable contact with the channel, creating a gap therebetween, and a fluid flow element for removing emboli efficiently from the instrument port, wherein the fluid flow element includes the gap. Disclosed fluid flow systems are for use in the disclosed instrument ports. Methods are also disclosed for removably securing an instrument sleeve to a port body by anchoring the instrument port to heart tissue, making at least one flood line in a channel, flushing out emboli, and performing surgery with the instrument port.

Abstract: An unmanned aerial vehicle includes at least one rotor motor configured to drive at least one propeller to rotate. The unmanned aerial vehicle includes a data center including a processor; a data storage component; and a wireless communications component. The unmanned aerial vehicle includes a hybrid generator system configured to provide power to the at least one rotor motor and to the data center, the hybrid generator system including a rechargeable battery configured to provide power to the at least one rotor motor; an engine configured to generate mechanical power; and a generator motor coupled to the engine and configured to generate electrical power from the mechanical power generated by the engine. The data center may include an intelligent data management module configured to control power distribution and execution of mission tasks in response to available power generation and mission task priorities.

Abstract: A linear stacked stage suitable for REBL may include a first upper fast stage configured to translate a first plurality of wafers in a first direction along a first axis, the first upper fast stage configured to secure a first plurality of wafers; a second upper fast stage configured to translate a second plurality of wafers in a second direction along the first axis, the second upper fast stage configured to secure the second plurality of wafers, the second direction opposite to the first direction, wherein the translation of the first upper fast stage and the translation of the second upper fast stage are configured to substantially eliminate inertial reaction forces generated by motion of the first upper fast stage and the second upper fast stage; and a carrier stage configured to translate the first and second upper fast stages along a second axis.

Abstract: An instrument port for introducing instruments into a surgical site, including a port body having a channel running therethrough from a proximal end to a distal end, an instrument sleeve in slidable contact with the channel, creating a gap therebetween, and fluid flow for removing emboli efficiently from the instrument port, wherein the fluid flow includes the gap is provided. A fluid flow system for use in an instrument port is provided. A method of removably securing an instrument sleeve to a port body by anchoring the instrument port to heart tissue, making at least one flood line in a channel, flushing out emboli, and performing surgery with the instrument port.

Abstract: An electrostatic clamp is provided having a clamping plate, wherein the clamping plate has a central region and an annulus region. A plurality of gas supply orifices are defined in the central region of the clamping plate, wherein the plurality of gas supply orifices are in fluid communication with a pressurized gas supply, and wherein the pressurized gas supply is configured to provide a cushion of gas between the clamping surface and the workpiece in the central region of the clamping plate via the plurality of gas supply orifices. One or more gas return orifices defined in one or more of the central region and annulus region of the clamping plate, wherein the one or more gas return orifices are in fluid communication with a vacuum source, therein generally defining an exhaust path for the cushion of gas.