Patents by Inventor Sampann ARORA

Sampann ARORA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • APPARATUS FOR USE IN A METROLOGY PROCESS OR LITHOGRAPHIC PROCESS
    Publication number: 20230205101
    Abstract: An apparatus for use in a metrology process or a lithographic process, the apparatus including: an object support module adapted to hold an object; and a first gas shower arranged on a first side of the object support module and adapted to emit a gas with a first velocity in a first gas direction which is a horizontal direction to cause a net gas flow in the apparatus to be a substantially horizontal gas flow in the first gas direction at least above the object support module.
    Type: Application
    Filed: May 27, 2021
    Publication date: June 29, 2023
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Luuc KEULEN, Jeroen Gerard GOSEN, Dennis Herman Caspar VAN BANNING, Sampann ARORA, Michaél Johannes Christiaan RONDE, Lucas KUINDERSMA, Youssef Karel Maria DE VOS, Henricus Martinus Johannes VAN DE GROES, Allard Eelco KOOIKER, Wouter Onno PRIL, Johan VAN GEND