Abstract: A method and apparatus for chemical mechanical polishing of substrates, and more particularly a method and apparatus related to a carrier had for use in chemical mechanical polishing is provided. In one embodiment the carrier head assembly comprises a base assembly for providing support to the substrate, a flexible membrane mounted on the base assembly having a generally circular central portion with a lower surface that provides a substrate mounting surface, and a plurality of independently pressurizable chambers formed between the base assembly and the flexible membrane, comprising an annular outer chamber and a non-circular inner chamber, is provided.

Abstract: One embodiment provides a retaining ring assembly. The retaining ring assembly comprises a retaining ring configured to circumferentially surround and retain the substrate within an inner surface of the retaining ring, and a flexure coupled to the retaining ring. The flexure is configured to maintain a gap between an inner surface of a carrier ring and an outer surface of the retaining ring, and the carrier ring is circumferentially surrounding the retaining ring.

Abstract: One embodiment provides a retaining ring assembly. The retaining ring assembly comprises a retaining ring configured to circumferentially surround and retain the substrate within an inner surface of the retaining ring, and a flexure coupled to the retaining ring. The flexure is configured to maintain a gap between an inner surface of a carrier ring and an outer surface of the retaining ring, and the carrier ring is circumferentially surrounding the retaining ring.

Abstract: A system and method for detecting speed related defects in an electronic assembly includes application specific integrated circuits (ASICs) designed with registered I/O's to provide true at-speed testing of the electronic assembly. An interconnect test engine and a test access port controller control the generation of a progressive binary patterns. The test engine receives captured data from the other ASICs in response to the binary patterns. The method includes generating binary progressive scan patterns for the output registers of one ASIC that are scanned and captured at the input registers of another ASIC. The test results are stored in a multiple input shift register (MISR) where they can be accessed for examination and diagnostic evaluations.

Abstract: An apparatus and method for use at a motor vehicle emission test station, providing wireless communication between a computer and a technician. The computer includes a sound card and voice recognition software, and is housed in a console, having test equipment, video and audio transmitters, and an audio receiver. The technician wears a portable user interface, including a communications pack with a video receiver, an audio receiver, an audio transmitter, and a battery pack. The interface also includes a special helmet, equipped with a video display, a microphone, and headphones. The wireless communications link established by these transmitters, receivers, and interface components enables the technician to carry out testing and inspection procedures on a motor vehicle in a location remote from the computer.