Patents by Inventor Samuel Howells

Samuel Howells has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Pyrometry error detection sensor for RTP temperature control system
    Patent number: 12159797
    Abstract: Embodiments disclosed herein include a method for determining a temperature error of a pyrometer. In an embodiment, the method comprises measuring a first signal with a first sensor of the pyrometer and measuring a second signal with a second sensor of the pyrometer. In an embodiment, the method further comprises determining a reflectivity of a reflector plate from the first signal and the second signal, and determining the temperature error using the reflectivity.
    Type: Grant
    Filed: August 16, 2021
    Date of Patent: December 3, 2024
    Assignee: Applied Materials, Inc.
    Inventors: Wolfgang Aderhold, Samuel Howells, Amritha Rammohan, Huy Q. Nguyen
  • METHOD TO MEASURE RADICAL ION FLUX USING A MODIFIED PIRANI VACUUM GAUGE ARCHITECTURE
    Publication number: 20230187169
    Abstract: Embodiments disclosed herein include, a sensor for detecting radical ion flux. In an embodiment, the sensor comprises a first resistor, where the first resistor comprises a length of wire of a first catalytic composition. In an embodiment, a second resistor is electrically coupled to the first resistor, where the second resistor comprises a length of wire of the first catalytic composition. In an embodiment, the second resistor is coated with a non-catalytic material.
    Type: Application
    Filed: December 13, 2021
    Publication date: June 15, 2023
    Inventors: Martin Hilkene, Samuel Howells
  • PYROMETRY ERROR DETECTION SENSOR FOR RTP TEMPERATURE CONTROL SYSTEM
    Publication number: 20230051521
    Abstract: Embodiments disclosed herein include a method for determining a temperature error of a pyrometer. In an embodiment, the method comprises measuring a first signal with a first sensor of the pyrometer and measuring a second signal with a second sensor of the pyrometer. In an embodiment, the method further comprises determining a reflectivity of a reflector plate from the first signal and the second signal, and determining the temperature error using the reflectivity.
    Type: Application
    Filed: August 16, 2021
    Publication date: February 16, 2023
    Inventors: Wolfgang Aderhold, Samuel Howells, Amritha Rammohan, Huy Q. Nguyen
  • Optical proximity correction in raster scan printing based on corner matching templates
    Publication number: 20060002603
    Abstract: Methods and apparatus for correcting defects, such as rounded corners and line end shortening, in patterns formed via lithography are provided. Such defects are compensated for “post-rasterization” by manipulating the grayscale values of pixel maps.
    Type: Application
    Filed: July 1, 2004
    Publication date: January 5, 2006
    Inventors: Robert Beauchaine, Thomas Chabreck, Samuel Howells, John Hubbard, Asher Klatchko, Peter Pirogovsky, Robin Teitzel
  • Area based optical proximity correction in raster scan printing
    Publication number: 20060001688
    Abstract: Methods and apparatus for correcting defects, such as rounded corners and line end shortening, in patterns formed via lithography are provided. Such defects are compensated for “post-rasterization” by manipulating the grayscale values of pixel maps.
    Type: Application
    Filed: July 1, 2004
    Publication date: January 5, 2006
    Inventors: Thomas Chabreck, Samuel Howells, John Hubbard, Robin Teitzel