Patents by Inventor Samuel W. Shannon

Samuel W. Shannon has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MOVABLE SEMICONDUCTOR PROCESSING CHAMBER FOR IMPROVED SERVICEABILITY
    Publication number: 20220093426
    Abstract: Exemplary substrate processing systems may include a base. The systems may include a chamber body having a transfer region housing that defines a transfer region. The transfer region housing may include a first portion and a second portion. The systems may include a lid assembly positioned atop the chamber body. The lid assembly may include a lid and a lid stack. The systems may include one or more lift mechanisms that elevate the first portion of the transfer region housing and at least a portion of the lid assembly relative to the base. The first portion and the second portion may mate with one another when the transfer region housing is in an operational configuration. The first portion and the second portion may be separated when the first portion of the transfer region housing is elevated.
    Type: Application
    Filed: September 21, 2020
    Publication date: March 24, 2022
    Applicant: Applied Materials, Inc.
    Inventors: Samuel W. Shannon, Luke Bonecutter, Viren Kalsekar, Chahal Neema