Patents by Inventor San-Ching Lin

San-Ching Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Non-invasive wafer transfer position diagnosis and calibration
    Patent number: 6965432
    Abstract: An apparatus and method for detecting mispositioned wafers attributable to transfer shift of the wafer are disclosed. A calibration wafer has a target region comprising a pattern of optically distinguishable features from which is determined the position of the calibration wafer within the chamber subsequent to its transfer therein. Preferably, the features comprise a pattern of colors that can be detected by spectroscopy. A preferred form and manner of providing such color features is by way of dielectric thin film filters.
    Type: Grant
    Filed: June 7, 2002
    Date of Patent: November 15, 2005
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yu-Yi Wu, Kun-Ei Chen, San-Ching Lin
  • Non-invasive wafer transfer position diagnosis and calibration
    Publication number: 20030227624
    Abstract: An apparatus and method for detecting mispositioned wafers attributable to transfer shift of the wafer are disclosed. A calibration wafer has a target region comprising a pattern of optically distinguishable features from which is determined the position of the calibration wafer within the chamber subsequent to its transfer therein. Preferably, the features comprise a pattern of colors that can be detected by spectroscopy. A preferred form and manner of providing such color features is by way of dielectric thin film filters.
    Type: Application
    Filed: June 7, 2002
    Publication date: December 11, 2003
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yu-Yi Wu, Kun-Ei Chen, San-Ching Lin