Patents by Inventor Sandeep Koppikar

Sandeep Koppikar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Chemical mechanical polishing apparatus with non-conductive elements
    Publication number: 20060009132
    Abstract: Conductive elements of a chemical mechanical polishing system may generate undesired eddy currents under the influence of a time-dependent magnetic field used in an eddy current monitoring system. To improve the accuracy of an eddy current monitoring system, elements that may contribute an undesired signal to the sensed eddy current signal may be fabricated from a non-conductive material such as plastic or ceramic. In some implementations, elements may be fabricated from non-magnetic materials.
    Type: Application
    Filed: September 2, 2005
    Publication date: January 12, 2006
    Inventors: Doyle Bennett, Sandeep Koppikar, Jeffrey David, Boguslaw Swedek, Nils Johansson