Patents by Inventor Sandeep KUMPALA

Sandeep KUMPALA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • On-board metrology (OBM) design and implication in process tool
    Patent number: 10388549
    Abstract: Implementations of the present disclosure generally relate to an improved factory interface that is coupled to an on-board metrology housing configured for measuring film properties of a substrate. In one implementation, an apparatus comprises a factory interface, and a metrology housing removably coupled to the factory interface through a load port, the metrology housing comprises an on-board metrology assembly for measuring properties of a substrate to be transferred into the metrology housing.
    Type: Grant
    Filed: November 9, 2016
    Date of Patent: August 20, 2019
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Khokan C. Paul, Jay D. Pinson, II, Juan Carlos Rocha-Alvarez, Hari K. Ponnekanti, Rupankar Choudhury, Shekhar Athani, Sandeep Kumpala, Hanish Kumar Panavalappil Kumarankutty
  • ON-BOARD METROLOGY (OBM) DESIGN AND IMPLICATION IN PROCESS TOOL
    Publication number: 20170148654
    Abstract: Implementations of the present disclosure generally relate to an improved factory interface that is coupled to an on-board metrology housing configured for measuring film properties of a substrate. In one implementation, an apparatus comprises a factory interface, and a metrology housing removably coupled to the factory interface through a load port, the metrology housing comprises an on-board metrology assembly for measuring properties of a substrate to be transferred into the metrology housing.
    Type: Application
    Filed: November 9, 2016
    Publication date: May 25, 2017
    Inventors: Khokan C. PAUL, Jay D. PINSON, II, Juan Carlos ROCHA-ALVAREZ, Hari K. PONNEKANTI, Rupankar CHOUDHURY, Shekhar ATHANI, Sandeep KUMPALA, Hanish Kumar PANAVALAPPIL KUMARANKUTTY