Patents by Inventor Sandeep R Koppikar

Sandeep R Koppikar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Chemical mechanical polishing apparatus with non-conductive elements
    Patent number: 6945845
    Abstract: Conductive elements of a chemical mechanical polishing system may generate undesired eddy currents under the influence of a time-dependent magnetic field used in an eddy current monitoring system. To improve the accuracy of an eddy current monitoring system, elements that may contribute an undesired signal to the sensed eddy current signal may be fabricated from a non-conductive material such as plastic or ceramic. In some implementations, elements may be fabricated from non-magnetic materials.
    Type: Grant
    Filed: August 18, 2003
    Date of Patent: September 20, 2005
    Assignee: Applied Materials, Inc.
    Inventors: Doyle E Bennett, Sandeep R Koppikar, Jeffrey Drue David, Boguslaw A Swedek, Nils Johansson
  • Chemical mechanical polishing apparatus with non-conductive elements
    Publication number: 20040176014
    Abstract: Conductive elements of a chemical mechanical polishing system may generate undesired eddy currents under the influence of a time-dependent magnetic field used in an eddy current monitoring system. To improve the accuracy of an eddy current monitoring system, elements that may contribute an undesired signal to the sensed eddy current signal may be fabricated from a non-conductive material such as plastic or ceramic. In some implementations, elements may be fabricated from non-magnetic materials.
    Type: Application
    Filed: August 18, 2003
    Publication date: September 9, 2004
    Inventors: Doyle E. Bennett, Sandeep R. Koppikar, Jeffrey Drue David, Boguslaw A. Swedek, Nils Johansson