Patents by Inventor Sandeep Sukumaran

Sandeep Sukumaran has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and system for flow measurement and validation of a mass flow controller
    Patent number: 7424895
    Abstract: Systems and methods for flow verification and validation of mass flow controllers are disclosed. A mass flow controller may be commanded to a specified flow and flow measurement commenced. During an interval, gas is accumulated in a first volume and measurements taken within this volume. The various measurements taken during the interval may then be used to calculate the flow rate. The flow rate, in turn, may be used to determine the accuracy of the mass flow controller relative to a setpoint.
    Type: Grant
    Filed: September 21, 2004
    Date of Patent: September 16, 2008
    Assignee: Celerity, Inc.
    Inventors: Stuart A. Tison, Sandeep Sukumaran, James Barker
  • Method and system for flow measurement and validation of a mass flow controller
    Patent number: 7412986
    Abstract: Systems and methods for flow verification and validation of mass flow controllers are disclosed. A mass flow controller may be commanded to a specified flow and flow measurement commenced. Gas is accumulated in a first volume and while measurements are taken within this volume. Gas may then flow into a second volume while measurements are taken. The various measurements taken during the two intervals may then be used to calculate the flow rate. The flow rate, in turn, may be used to determine the accuracy of the mass flow controller relative to a setpoint. Additionally, these systems and methods may utilize only one volume to perform flow verification by flowing gas into this volume, taking measurements, and calculating the flow rate based only upon this set of measurements.
    Type: Grant
    Filed: July 9, 2004
    Date of Patent: August 19, 2008
    Assignee: Celerity, Inc.
    Inventors: Stuart A. Tison, Sandeep Sukumaran, James Barker
  • Method and system for flow measurement and validation of a mass flow controller
    Publication number: 20060011237
    Abstract: Systems and methods for flow verification and validation of mass flow controllers are disclosed. A mass flow controller may be commanded to a specified flow and flow measurement commenced. During an interval, gas is accumulated in a first volume and measurements taken within this volume. The various measurements taken during the interval may then be used to calculate the flow rate. The flow rate, in turn, may be used to determine the accuracy of the mass flow controller relative to a setpoint.
    Type: Application
    Filed: September 21, 2004
    Publication date: January 19, 2006
    Inventors: Stuart Tison, Sandeep Sukumaran, James Barker
  • Method and system for flow measurement and validation of a mass flow controller
    Publication number: 20060005882
    Abstract: Systems and methods for flow verification and validation of mass flow controllers are disclosed. A mass flow controller may be commanded to a specified flow and flow measurement commenced. Gas is accumulated in a first volume and while measurements are taken within this volume. Gas may then flow into a second volume while measurements are taken. The various measurements taken during the two intervals may then be used to calculate the flow rate. The flow rate, in turn, may be used to determine the accuracy of the mass flow controller relative to a setpoint. Additionally, these systems and methods may utilize only one volume to perform flow verification by flowing gas into this volume, taking measurements, and calculating the flow rate based only upon this set of measurements.
    Type: Application
    Filed: July 9, 2004
    Publication date: January 12, 2006
    Inventors: Stuart Tison, Sandeep Sukumaran, James Barker