Patents by Inventor Sandra BLAAK

Sandra BLAAK has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods and apparatus for acoustic metrology
    Patent number: 12618804
    Abstract: A metrology apparatus for determining one or more parameters of a structure fabricated in or on a semiconductor substrate. The apparatus comprises a transducer array comprising a plurality of transducers positioned in a plane. The plurality of transducers comprises at least one transmitter transducer for emitting acoustic radiation in a frequency range from 1 GHz to 100 GHz towards the structure, and at least one receiver transducer for receiving acoustic radiation reflected and/or diffracted from the structure.
    Type: Grant
    Filed: December 15, 2021
    Date of Patent: May 5, 2026
    Assignee: ASML Netherlands B.V.
    Inventors: Mustafa Ümit Arabul, Zili Zhou, Willem Marie Julia Marcel Coene, Coen Adrianus Verschuren, Paul Louis Maria Joseph Van Neer, Daniele Piras, Sandra Blaak, Wouter Dick Koek, Robert Wilhelm Willekers
  • METHODS AND APPARATUS FOR ACOUSTIC METROLOGY
    Publication number: 20240085379
    Abstract: A metrology apparatus for determining one or more parameters of a structure fabricated in or on a semiconductor substrate. The apparatus comprises a transducer array comprising a plurality of transducers positioned in a plane. The plurality of transducers comprises at least one transmitter transducer for emitting acoustic radiation in a frequency range from 1 GHz to 100 GHz towards the structure, and at least one receiver transducer for receiving acoustic radiation reflected and/or diffracted from the structure.
    Type: Application
    Filed: December 15, 2021
    Publication date: March 14, 2024
    Applicant: ASML Netherlands B.V.
    Inventors: Mustafa Ümit ARABUL, Zili ZHOU, Willem Marie,Julia,Marcel COENE, Coen Adrianus VERSCHUREN, Paul, Louis,Maria Joseph VAN NEER, Daniele PIRAS, Sandra BLAAK, Wouter Dick KOEK, Robert Wilhelm WILLEKERS