Abstract: A semiconductor device includes a semiconductor substrate including isolation regions defining first and second active regions having a first and second conductivity type, respectively, first threshold voltage control regions in predetermined regions of the first active region, wherein the first threshold voltage control regions have the first conductivity type and a different impurity concentration from the first active region, a first gate trench extending across the first active region, wherein portions of side bottom portions of the first gate trench adjacent to the respective isolation region are disposed at a higher level than a central bottom portion of the first gate trench, and the first threshold voltage control regions remain in the first active region under the side bottom portions of the first gate trench adjacent to the respective isolation region, and a first gate pattern. Methods of manufacturing such semiconductor devices are also provided.

Abstract: A semiconductor device includes a semiconductor substrate including isolation regions defining first and second active regions having a first and second conductivity type, respectively, first threshold voltage control regions in predetermined regions of the first active region, wherein the first threshold voltage control regions have the first conductivity type and a different impurity concentration from the first active region, a first gate trench extending across the first active region, wherein portions of side bottom portions of the first gate trench adjacent to the respective isolation region are disposed at a higher level than a central bottom portion of the first gate trench, and the first threshold voltage control regions remain in the first active region under the side bottom portions of the first gate trench adjacent to the respective isolation region, and a first gate pattern. Methods of manufacturing such semiconductor devices are also provided.

Abstract: A semiconductor device includes a semiconductor substrate including isolation regions defining first and second active regions having a first and second conductivity type, respectively, first threshold voltage control regions in predetermined regions of the first active region, wherein the first threshold voltage control regions have the first conductivity type and a different impurity concentration from the first active region, a first gate trench extending across the first active region, wherein portions of side bottom portions of the first gate trench adjacent to the respective isolation region are disposed at a higher level than a central bottom portion of the first gate trench, and the first threshold voltage control regions remain in the first active region under the side bottom portions of the first gate trench adjacent to the respective isolation region, and a first gate pattern. Methods of manufacturing such semiconductor devices are also provided.

Abstract: An electrically erasable and programmable read-only memory (EEPROM) is provided. The EEPROM includes a semiconductor substrate including spaced apart first, second and third active regions, a common floating gate traversing over the first through third active regions, source/drain regions formed in the third active region on opposite sides of the floating gate, a first interconnect connected to the first active region, a second interconnect connected to the second active region, and a third interconnect connected to either one of the source/drain regions.

Abstract: A semiconductor device includes a semiconductor substrate including isolation regions defining first and second active regions having a first and second conductivity type, respectively, first threshold voltage control regions in predetermined regions of the first active region, wherein the first threshold voltage control regions have the first conductivity type and a different impurity concentration from the first active region, a first gate trench extending across the first active region, wherein portions of side bottom portions of the first gate trench adjacent to the respective isolation region are disposed at a higher level than a central bottom portion of the first gate trench, and the first threshold voltage control regions remain in the first active region under the side bottom portions of the first gate trench adjacent to the respective isolation region, and a first gate pattern. Methods of manufacturing such semiconductor devices are also provided.

Abstract: In one aspect, an electrically erasable and programmable read-only memory (EEPROM) is provided. The EEPROM includes a semiconductor substrate including spaced apart first, second and third active regions, a common floating gate traversing over the first through third active regions, source/drain regions formed in the third active region on opposite sides of the floating gate, a first interconnect connected to the first active region, a second interconnect connected to the second active region, and a third interconnect connected to either one of the source/drain regions.

Abstract: An electrically erasable and programmable read-only memory (EEPROM) is provided. The EEPROM includes a semiconductor substrate including spaced apart first, second and third active regions, a common floating gate traversing over the first through third active regions, source/drain regions formed in the third active region on opposite sides of the floating gate, a first interconnect connected to the first active region, a second interconnect connected to the second active region, and a third interconnect connected to either one of the source/drain regions.

Abstract: A method of fabricating a semiconductor device including gate dielectrics having different thicknesses may be provided. A method of fabricating a semiconductor device may include providing a substrate having a higher voltage device region and a lower voltage device region, forming an anti-oxidation layer on the substrate, and selectively removing portions of the anti-oxidation layer on the substrate. The method may also include performing a first thermal oxidization on the substrate to form a field oxide layer on the selectively removed portions of the anti-oxidation layer, removing the anti-oxidation layer disposed on the higher voltage device region, performing a second thermal oxidization on the substrate to form a central higher voltage gate oxide layer on the higher voltage device region, removing the anti-oxidation layer disposed on the lower voltage device region, and performing a third thermal oxidization on the substrate to form a lower voltage gate oxide layer on the lower voltage device region.

Abstract: A method of fabricating a semiconductor device including gate dielectrics having different thicknesses may be provided. A method of fabricating a semiconductor device may include providing a substrate having a higher voltage device region and a lower voltage device region, forming an anti-oxidation layer on the substrate, and selectively removing portions of the anti-oxidation layer on the substrate. The method may also include performing a first thermal oxidization on the substrate to form a field oxide layer on the selectively removed portions of the anti-oxidation layer, removing the anti-oxidation layer disposed on the higher voltage device region, performing a second thermal oxidization on the substrate to form a central higher voltage gate oxide layer on the higher voltage device region, removing the anti-oxidation layer disposed on the lower voltage device region, and performing a third thermal oxidization on the substrate to form a lower voltage gate oxide layer on the lower voltage device region.

Abstract: In one aspect, an electrically erasable and programmable read-only memory (EEPROM) is provided. The EEPROM includes a semiconductor substrate including spaced apart first, second and third active regions, a common floating gate traversing over the first through third active regions, source/drain regions formed in the third active region on opposite sides of the floating gate, a first interconnect connected to the first active region, a second interconnect connected to the second active region, and a third interconnect connected to either one of the source/drain regions.

Abstract: An EEPROM includes a semiconductor substrate and a device isolation region defining first, second and third active regions in the semiconductor substrate. The EEPROM also includes at least one first insulation region in at least one first trench in the first active region. A floating gate insulation layer is disposed on the at least one first insulation region and the first, second and third active regions and a floating gate conduction layer is disposed on the floating gate insulation layer. Impurity-containing regions may be disposed in each of the first, second and third active regions at respective sides of the floating gate conduction layer. The floating gate insulation layer may include at least one thinned portion proximate the at least one first insulation region, which may aid Fowler-Nordheim tunneling at this site.

Abstract: A method of programming an EEPROM including a first active region, a second active region and a third active region located separately in a semiconductor substrate, a common floating gate above and intersecting the active regions, first impurity regions located at both sides of the common floating gate in the first active region, second impurity regions located at both sides of the common floating gate in the second active regions and third impurity region, located at both sides of the common floating gate in the third active region. The method includes: applying a programming voltage to the first impurity regions in the first active region and the third impurity regions in the third active region; and applying a ground voltage to the second impurity regions in the second active region.

Abstract: The present invention relates to an array of flash memory cells whose unit cell includes a single transistor of MONOS/SONOS structure (Metal/poly-Silicon Oxide Nitride Oxide Semiconductor) and to data programming and erasing using the same. The array of the flash memory cells includes a plurality of flash memory cells arranged in a form of a matrix. The matrix includes a plurality of word lines arranged in one line direction and connected to gates of the flash memory cells is a row, a plurality of selection lines arranged in a direction perpendicular to the word lines and connected to the sources of the flash memory cells arranged in a column, and a plurality of bit lines arranged in a direction parallel to the selection lines and connected to the drains of the flash memory cells of the same column. To program and erase the cells, different biasing conditions are applied to the word lines, selection lines, bit lines, and the wells of the transistors.

Abstract: Disclosed is a nonvolatile memory device comprising a semiconductor substrate defining first and second active regions arranged in one direction; a first gate insulating layer and a floating gate deposited on the first and second active regions in a predetermined pattern; a second gate insulating layer and a control gate line deposited in one direction perpendicular to the first and second active regions and covering the floating gate; first impurity regions formed in the first and second active regions at one side of the control gate line; second impurity regions formed in the first and second active regions at other side of the control gate line; first contact plugs contacted with the first impurity regions; and a common conductive line formed in one direction on the semiconductor substrate at the other side of the control gate line, for connecting the second impurity regions of the first and second active regions.

Abstract: The present invention relates to an array of flash memory cells whose unit cell includes a single transistor of MONOS/SONOS structure (Metal/poly-Silicon Oxide Nitride Oxide Semiconductor) and to data programming and erasing using the same. The array of the flash memory cells includes a plurality of flash memory cells arranged in a form of a matrix. The matrix includes a plurality of word lines arranged in one line direction and connected to gates of the flash memory cells is a row, a plurality of selection lines arranged in a direction perpendicular to the word lines and connected to the sources of the flash memory cells arranged in a column, and a plurality of bit lines arranged in a direction parallel to the selection lines and connected to the drains of the flash memory cells of the same column. To program and erase the cells, different biasing conditions are applied to the word lines, selection lines, bit lines, and the wells of the transistors.

Abstract: A flash memory cell array and a method for programming and erasing data using the same are provided, in which problems related to over-erasing and disturbance are overcome and a cell area per bit is small to obtain high reliability and high packing density. In a flash memory cell array which includes a plurality of flash memory cells arranged in a matrix form, each of the cells including a selection transistor and a memory transistor serially connected with each other, a method for programming data using the flash memory cell array comprising the steps of setting a threshold voltage of the selection transistors at an initial threshold voltage level VT,ref before programming the flash memory cells at N bit data level (level of 2N), selecting a cell for programming from the flash memory cells, and setting a threshold voltage level corresponding to the N bit in the selection transistors so that the memory transistor of the selected flash memory cell is programmed at a particular level among the N bit data level.

Abstract: The present invention relates to an array of flash memory cells whose unit cell includes a single transistor of MONOS/SONOS structure (Metal/poly-Silicon Oxide Nitride Oxide Semiconductor) and to data programming and erasing using the same. The array of the flash memory cells includes a plurality of flash memory cells arranged in a form of a matrix. The matrix includes a plurality of word lines arranged in one line direction and connected to gates of the flash memory cells is a row, a plurality of selection lines arranged in a direction perpendicular to the word lines and connected to the sources of the flash memory cells arranged in a column, and a plurality of bit lines arranged in a direction parallel to the selection lines and connected to the drains of the flash memory cells of the same column. To program and erase the cells, different biasing conditions are applied to the word lines, selection lines, bit lines, and the wells of the transistors.

Abstract: A method for fabricating a high voltage transistor includes the steps of: forming a plurality of drift regions on a semiconductor substrate of a first conductive type; implanting drift ions of a second conductive type into surfaces of the drift regions of the semiconductor substrate at a first depth; implanting drift ions of the second conductive type into the surfaces of the drift regions of the semiconductor substrate at a second depth deeper than the first depth; implanting first conductive channel stop ions into the semiconductor substrate thereby forming a space between the semiconductor substrate and the drift regions; forming a device isolation film on a surface of the semiconductor substrate into which the channel stop ions are implanted; forming a gate electrode by inserting a gate insulating film on the semiconductor substrate between the drift regions; and forming a source/drain impurity diffusion region of a second conductive type in the surface of the semiconductor substrate at both sides of the

Abstract: Disclosed is a nonvolatile memory device comprising a semiconductor substrate defining first and second active regions arranged in one direction; a first gate insulating layer and a floating gate deposited on the first and second active regions in a predetermined pattern; a second gate insulating layer and a control gate line deposited in one direction perpendicular to the first and second active regions and covering the floating gate; first impurity regions formed in the first and second active regions at one side of the control gate line; second impurity regions formed in the first and second active regions at other side of the control gate line; first contact plugs contacted with the first impurity regions; and a common conductive line formed in one direction on the semiconductor substrate at the other side of the control gate line, for connecting the second impurity regions of the first and second active regions.

Abstract: A flash memory cell array and a method for programming and erasing data using the same are provided, in which problems related to over-erasing and disturbance are overcome and a cell area per bit is small to obtain high reliability and high packing density. In a flash memory cell array which includes a plurality of flash memory cells arranged in a matrix form, each of the cells including a selection transistor and a memory transistor serially connected with each other, a method for programming data using the flash memory cell array comprising the steps of setting a threshold voltage of the selection transistors at an initial threshold voltage level VT,ref before programming the flash memory cells at N bit data level (level of 2N), selecting a cell for programming from the flash memory cells, and setting a threshold voltage level corresponding to the N bit in the selection transistors so that the memory transistor of the selected flash memory cell is programmed at a particular level among the N bit data level.