Abstract: Embodiments of the inventive concept provide a wireless power apparatus for a substrate treating apparatus and a manufacturing method for the wireless power apparatus for the substrate treating apparatus for preventing a heat generation by preventing a generation of an eddy current in a coupling element, if the coupling element is used around an outer housing at which an induced magnetic field is formed. The inventive concept provides a wireless power apparatus for a substrate treating apparatus.

Abstract: A substrate transport robot capable of enhancing processing speed and avoiding interference with structures and a system including the substrate transport robot are provided. The substrate transport robot includes: one or more robot arms including transfer hands and transferring semiconductor substrates with the transfer hands; an arm driving module coupled to each of the robot arms and controlling the movement of each of the robot arms; and a horizontal/vertical movement module controlling the position movement of the arm driving module, wherein multiple robot arms are provided, and multiple transfer hands are included in each of the multiple robot arms.

Abstract: An oil pressure switch, which is connected in an oil path of a piston oil cooling jet to diagnose oil pressure, includes an upper body and a lower body, in which a plunger vertically moves according to oil pressure; a fixing plate that is disposed between the upper body and the lower body; a moving plate that selectively contacts a fixing plate according to movement of the plunger; a spring that generates an elastic force in a direction in which the moving plate selectively contacts the fixing plate; an output terminal that outputs an output signal according to contact between the moving plate and the fixing plate; and a parallel resistor that is electrically connected with the output terminal and electrically connected with a control resistor of a controller.

Abstract: An oil pressure switch, which is connected in an oil path of a piston oil cooling jet to diagnose oil pressure, includes an upper body and a lower body, in which a plunger vertically moves according to oil pressure; a fixing plate that is disposed between the upper body and the lower body; a moving plate that selectively contacts a fixing plate according to movement of the plunger; a spring that generates an elastic force in a direction in which the moving plate selectively contacts the fixing plate; an output terminal that outputs an output signal according to contact between the moving plate and the fixing plate; and a parallel resistor that is electrically connected with the output terminal and electrically connected with a control resistor of a controller.

Abstract: An oil pressure switch, which is connected in an oil path of a piston oil cooling jet to diagnose oil pressure, includes an upper body and a lower body, in which a plunger vertically moves according to oil pressure; a fixing plate that is disposed between the upper body and the lower body; a moving plate that selectively contacts a fixing plate according to movement of the plunger; a spring that generates an elastic force in a direction in which the moving plate selectively contacts the fixing plate; an output terminal that outputs an output signal according to contact between the moving plate and the fixing plate; and a parallel resistor that is electrically connected with the output terminal and electrically connected with a control resistor of a controller.

Abstract: A fuel vapor purge system may include a turbocharger including a turbine disposed in an exhaust line, and a compressor; a canister connected to a fuel tank through a vapor line; a fuel pressure detector configured for detecting pressure in the fuel tank; a canister closing valve selectively closing an atmospheric path provided in the canister; a purge control solenoid valve disposed in a main purge line connected to the canister and selectively closing fuel vapor collected at the canister; a first check valve disposed in a first purge line and preventing the fuel vapor flowing along the first purge line from flowing reversely; a second check valve disposed in a second purge line preventing the fuel vapor flowing along the second purge line from flowing reversely; a differential pressure generating valve disposed in the intake line, and generating negative pressure; and an intake pressure sensor disposed in the intake line between the differential pressure generating valve and the compressor.

Abstract: An exhaust system having a differential pressure sensor may include an intake pipe that houses fresh air from the outside to supply the fresh air to a turbocharger; an exhaust pipe that supplies an EGR gas, having passed through a Diesel Particulate Filter (DPF) to upstream of the turbocharger to mix with the fresh air; and a differential pressure sensor that measures a pressure difference between the front end portion and the rear end portion of the DPF, wherein the differential pressure sensor is directly mounted in the exhaust pipe that is disposed at the rear end portion of the DPF.

Abstract: An oil pressure switch, which is connected in an oil path of a piston oil cooling jet to diagnose oil pressure, includes an upper body and a lower body, in which a plunger vertically moves according to oil pressure; a fixing plate that is disposed between the upper body and the lower body; a moving plate that selectively contacts a fixing plate according to movement of the plunger; a spring that generates an elastic force in a direction in which the moving plate selectively contacts the fixing plate; an output terminal that outputs an output signal according to contact between the moving plate and the fixing plate; and a parallel resistor that is electrically connected with the output terminal and electrically connected with a control resistor of a controller.

Abstract: A fuel vapor purge system may include a turbocharger including a turbine disposed in an exhaust line, and a compressor; a canister connected to a fuel tank through a vapor line; a fuel pressure detector configured for detecting pressure in the fuel tank; a canister closing valve selectively closing an atmospheric path provided in the canister; a purge control solenoid valve disposed in a main purge line connected to the canister and selectively closing fuel vapor collected at the canister; a first check valve disposed in a first purge line and preventing the fuel vapor flowing along the first purge line from flowing reversely; a second check valve disposed in a second purge line preventing the fuel vapor flowing along the second purge line from flowing reversely; a differential pressure generating valve disposed in the intake line, and generating negative pressure; and an intake pressure sensor disposed in the intake line between the differential pressure generating valve and the compressor.

Abstract: An exhaust system having a differential pressure sensor may include an intake pipe that houses fresh air from the outside to supply the fresh air to a turbocharger; an exhaust pipe that supplies an EGR gas, having passed through a Diesel Particulate Filter (DPF) to upstream of the turbocharger to mix with the fresh air; and a differential pressure sensor that measures a pressure difference between the front end portion and the rear end portion of the DPF, wherein the differential pressure sensor is directly mounted in the exhaust pipe that is disposed at the rear end portion of the DPF.

Abstract: The disclosure is related to renting a parking space to others. In order to renting a parking space to others, a service server monitors a target parking space through associated monitoring devices. Based on the monitoring information, the service server detects a vehicle for renting the target parking space. The service server performs a parking space renting operation in connection with user equipment user equipment associated with a parking space owner and a parking space requester.

Abstract: A semiconductor wafer regenerating system is capable of easily and efficiently removing fabricating patterns formed on a semiconductor wafer to enable reuse of the semiconductor wafer. The system, which removes patterns of the semiconductor wafer in a dry manner by using blasting grit, includes a mesh conveyor, a grit blaster, a swinging element, a collecting element, a separating element, and a dust collector. The mesh conveyor transports the semiconductor wafer so that the patterns face upward. The grit blaster is installed above the mesh conveyor and has at least one blasting nozzle for blasting grits toward the semiconductor wafer to remove the patterns from the semiconductor wafer. The swinging element swings the blasting nozzle in a plane perpendicular to a transporting path of the semiconductor wafer along the mesh conveyor. The collecting element underneath the mesh conveyor collects pulverulent bodies including grits, chips, and dusts falling from the mesh conveyor.

Abstract: Polytetrafluoroethylene molding powder which comprises 0.01 to 1% by weight of a perfluoro(vinyl ether) unit and which has a heat of crystallization of 18.0 to 25.0 J/g. The molding powder provides a molded article which has a flex life of not less than 7 million cycles, a creep resistance (total deformation at 200.degree. C.) of not more than 20%, and a creep resistance (total deformation at 25.degree. C.) of not more than 15%. The polytetrafluoroethylene molding powder which is excellent in both creep resistance and flex fatigue resistance is provided as a molding material for parts which are repeatedly bent such as pump.

Abstract: Polytetrafluoroethylene molding powder which comprises 0.01 to 1% by weight of a perfluoro(vinyl ether) unit and which has a heat of crystallization of 18.0 to 25.0 J/g. The molding powder provides a molded article which has a flex life of not less than 7 million cycles, a creep resistance (total deformation at 200.degree. C.) of not more than 20%, and a creep resistance (total deformation at 25.degree. C.) of not more than 15%. The polytetrafluoroethylene molding powder which is excellent in both creep resistance and flex fatigue resistance is provided as a molding material for parts which are repeatedly bent such as pump.