Abstract: A fireproof shutter includes a frame having an opening through which a transport rail for movement of a transport vehicle passes, the opening being divided into an upper opening and a lower opening based on the transport rail, an upper door mounted on the frame and configured to open and close the upper opening, and a lower door mounted on the frame and configured to open and close the lower opening.

Abstract: In one embodiment a transferring apparatus comprises a rail connected to a frame, a travelling part including a wheel that travels along the rail and a loading part for loading an object, and a particle collection receptacle provided at a side of the rail and configured to collect particles generated due to friction between the wheel and the rail when the wheel travels along the rail. A method of manufacturing an integrated circuit device using the transferring apparatus includes moving the travelling part to the object, picking up the object with the loading part thereby loading the object on the loading part, using the travelling part to move the object to a chamber, and forming a semiconductor device using the object.

Abstract: In one embodiment a transferring apparatus comprises a rail connected to a frame, a travelling part including a wheel that travels along the rail and a loading part for loading an object, and a particle collection receptacle provided at a side of the rail and configured to collect particles generated due to friction between the wheel and the rail when the wheel travels along the rail. A method of manufacturing an integrated circuit device using the transferring apparatus includes moving the travelling part to the object, picking up the object with the loading part thereby loading the object on the loading part, using the travelling part to move the object to a chamber, and forming a semiconductor device using the object.